Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator
Model:
AX8585
Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator
Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator
Model:
AX8585
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AX8585 Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator
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Overview
The AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry.Â
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
375g/Nm3
Flow Rate
22.7 lpm (6.0 gpm) per generator
Feed Gas
Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure
O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2 ), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2 )
Feed Gas Purity
Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
Operating Temperature
5 - 40°C (41 - 104°F)
Cooling Water Temperature Required
5 - 25°C (41 - 77°F)
Cooling Water Filtration Required
100 microns
Cooling Water Quality Required
3 - 0.5 MΩcm DI
Cooling Water Minimum Flow Required
22.7 lpm (6.0 gpm) per generator (configuration dependent)
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
11 kw per generator
Voltage Requirements
208 volts AC (±10%), three phase
Frequency
50/60 Hz
Exhaust Flow Rate
70.8 l/s (150 cfm) per generator
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
Control Air Pressure
70 - 100 psig (483 - 689 kPa)
Control Air Type
CDA or dry nitrogen, 40µ filtered
Control Air Fitting
0.25 in. compression (Swagelok®)
Exhaust Connection
8 in. diameter duct opening
Dimensions
28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
345 kg (760 lb) for system with one generator
Compliance
CE, UL/CSA, SEMI S2, SEMI F47
Altitude
Up to 1000 m (3280 ft) above mean sea level
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
375g/Nm3
Flow Rate
22.7 lpm (6.0 gpm) per generator
Feed Gas
Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure
O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2 ), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2 )
Feed Gas Purity
Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
Operating Temperature
5 - 40°C (41 - 104°F)
Cooling Water Temperature Required
5 - 25°C (41 - 77°F)
Cooling Water Filtration Required
100 microns
Cooling Water Quality Required
3 - 0.5 MΩcm DI
Cooling Water Minimum Flow Required
22.7 lpm (6.0 gpm) per generator (configuration dependent)
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
11 kw per generator
Voltage Requirements
208 volts AC (±10%), three phase
Frequency
50/60 Hz
Exhaust Flow Rate
70.8 l/s (150 cfm) per generator
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
Control Air Pressure
70 - 100 psig (483 - 689 kPa)
Control Air Type
CDA or dry nitrogen, 40µ filtered
Control Air Fitting
0.25 in. compression (Swagelok®)
Exhaust Connection
8 in. diameter duct opening
Dimensions
28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
345 kg (760 lb) for system with one generator
Compliance
CE, UL/CSA, SEMI S2, SEMI F47
Altitude
Up to 1000 m (3280 ft) above mean sea level
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Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator