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AX8585 Stand-Alone High Concentration Ozone Delivery System
AX8585
Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator
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 AX8585 Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator
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Specifications

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    375g/Nm3
  • Flow Rate
    22.7 lpm (6.0 gpm) per generator
  • Feed Gas
    Oxygen, Nitrogen (100 - 1000 ppm of total flow)
  • Feed Gas Supply Pressure
    O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)
  • Feed Gas Purity
    Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
  • Operating Temperature
    5 - 40°C (41 - 104°F)
  • Cooling Water Temperature Required
    5 - 25°C (41 - 77°F)
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    3 - 0.5 MΩcm DI
  • Cooling Water Minimum Flow Required
    22.7 lpm (6.0 gpm) per generator (configuration dependent)
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    11 kw per generator
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    70.8 l/s (150 cfm) per generator
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
  • Control Air Pressure
    70 - 100 psig (483 - 689 kPa)
  • Control Air Type
    CDA or dry nitrogen, 40µ filtered
  • Control Air Fitting
    0.25 in. compression (Swagelok®)
  • Exhaust Connection
    8 in. diameter duct opening
  • Dimensions
    28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    345 kg (760 lb) for system with one generator
  • Compliance
    CE, UL/CSA, SEMI S2, SEMI F47
  • Altitude
    Up to 1000 m (3280 ft) above mean sea level

Features

Environmentally Friendly Solution

For gate oxides and high-k dielectric materials, one of the precursors needs to be an oxidizer. Ozone has many advantages over other oxidizers as a precursor for ALD and as a strong oxidizing agent. Ozone has a high redox potential, can be generated at the point-of-use, and it decays naturally into oxygen (2O3 ⇒ 3O2). Therefore, it is considered a "green" chemical. If required, ozone can also be destroyed at the output of the process chamber using a catalytic or thermal destruct unit. This significantly lowers chemical disposal cost, as the output is oxygen and contains no ozone. Ozone is very stable at room temperature, making it a good choice for most applications. In addition to ALD, typical ozone applications include chemical vapor deposition (CVD), photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

Multi-channel Capability

The AX8585 system is configurable with up to four (4) independent channels to support multiple tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for a specific process. The ozone source for each channel is the newly released AX8410 PRIME ozone generator. It incorporates MKS patented, high flow, high concentration, ultra clean ozone generation technology. The AX8585 includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor, and status indicator panel.

Resources

Literature

Drawings & CADs

Application Notes

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