SEMOZON® AX8585 Stand-alone Ozone Delivery System for Advanced Processes

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Overview

SEMOZON® AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high flow, high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each SEMOZON AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.

Fully integrated Delivery system allows for fast, easy installation and quick start up with minimum connections required
Supports single or multiple process tools for maximum efficiency and lower cost of operation
Modular design allows each channel to be process matched for maximum flexibility
Closed-loop concentration control provides tighter process control for higher yields
User friendly controller with touch screen provides easy, central controls for interfacing with the tool, setting ozone concentration and flow rate, and safety monitoring

Products

		Compare	Model	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Flow Rate	Type	Ozone Output	Availability	Featured Item	Price		Brand
		AX8585 Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator Contact Us	AX8585 Ozone Delivery System, 200 slm, 1-4 Channel, PRIME Ozone Generator	UNIVERSAL	0.0	1.0	0.0		0.0	22.7 lpm (6.0 gpm) per generator	Ozone Gas Delivery System	375g/Nm³	Contact Us

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Specifications

Type

Ozone Gas Delivery System
Ozone Output

375g/Nm³
Flow Rate

22.7 lpm (6.0 gpm) per generator
Feed Gas

Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure

O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm²), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm²)
Feed Gas Purity

Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
Operating Temperature

5 - 40°C (41 - 104°F)
Cooling Water Temperature Required

5 - 25°C (41 - 77°F)
Cooling Water Filtration Required

100 microns
Cooling Water Quality Required

3 - 0.5 MΩcm DI
Cooling Water Minimum Flow Required

22.7 lpm (6.0 gpm) per generator (configuration dependent)
Cooling Water Connections Required

1 in. compression (Swagelok®)
Cooling Water Heat Load Required

11 kw per generator
Voltage Requirements

208 volts AC (±10%), three phase

Frequency

50/60 Hz
Exhaust Flow Rate

70.8 l/s (150 cfm) per generator
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
Control Air Pressure

70 - 100 psig (483 - 689 kPa)
Control Air Type

CDA or dry nitrogen, 40µ filtered
Control Air Fitting

0.25 in. compression (Swagelok®)
Exhaust Connection

8 in. diameter duct opening
Dimensions

28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

345 kg (760 lb) for system with one generator
Compliance

CE, UL/CSA, SEMI S2, SEMI F47
Altitude

Up to 1000 m (3280 ft) above mean sea level

Specifications

Type

Ozone Gas Delivery System
Ozone Output

375g/Nm³
Flow Rate

22.7 lpm (6.0 gpm) per generator
Feed Gas

Oxygen, Nitrogen (100 - 1000 ppm of total flow)
Feed Gas Supply Pressure

O2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm²), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm²)
Feed Gas Purity

Oxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
Operating Temperature

5 - 40°C (41 - 104°F)
Cooling Water Temperature Required

5 - 25°C (41 - 77°F)
Cooling Water Filtration Required

100 microns
Cooling Water Quality Required

3 - 0.5 MΩcm DI
Cooling Water Minimum Flow Required

22.7 lpm (6.0 gpm) per generator (configuration dependent)
Cooling Water Connections Required

1 in. compression (Swagelok®)
Cooling Water Heat Load Required

11 kw per generator
Voltage Requirements

208 volts AC (±10%), three phase

Frequency

50/60 Hz
Exhaust Flow Rate

70.8 l/s (150 cfm) per generator
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
Control Air Pressure

70 - 100 psig (483 - 689 kPa)
Control Air Type

CDA or dry nitrogen, 40µ filtered
Control Air Fitting

0.25 in. compression (Swagelok®)
Exhaust Connection

8 in. diameter duct opening
Dimensions

28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

345 kg (760 lb) for system with one generator
Compliance

CE, UL/CSA, SEMI S2, SEMI F47
Altitude

Up to 1000 m (3280 ft) above mean sea level