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industrial automation mass flow controller module
Mass Flow Controller Module, DB15, 4 Channel
industrial automation mass flow controller module
Mass Flow Controller Module, DB9, 4 Channel


  • Type
    Mass Flow Controller Module
  • ADC Native Resolution
  • Auxiliary Power Supply
    24 V ±5%
    This input will be used to power MFCs connected through IO connector.
    Each power output to MFC should be protected separately.
  • Power Consumption
    24 V ±5%
  • Anti-alias HW Filtering
    200Hz ±20%, 6dB/octave minimum
  • Analog Input Minimum Input CMRR
    50dB, 0-1kHz
  • Analog Input Maximum Integral Non-linearity
    ±2LSB (14bit @ 14v)
  • Analog Input Number of AO Channels
    16 , Single Ended (4 for each MFC: Valve test point, Flow signal output, Optional input, Pressure output)
  • Analog Input Voltage Range
    -2V to 14V
  • Analog Input Maximum Error Over Full Range
    ±0.05% of FS (over 20 - 30°C)
  • Analog Input Sampling Rate
    6.25 kHz (160µSec , for all 16 channels)
    (ADC oversampling is set to x32)
  • Analog Input Protection
    ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
  • Analog Output Number of AO Channels
    4 Single Ended (1 for each MFC: Set Point Input)
  • Analog Output DAC Native Resolution
  • Analog Output Maximum Output Current
    5mA, into a 2kOhm, 10nF load
  • Analog Output Output Accuracy at 25°C Ambient
    ±0.1% of FS @5v, ±0.05% of Full Scale @10v
  • Analog Output Settling Time
    ±2.5mV in 1msec into 2kOhm, 10nF load
  • Analog Output Protection
    ESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
  • Digital Output Maximum Voltage Drop when ON
    0.2V into 30kOhm Impedance
  • Digital Output Number of DO Channels
    12 (3 for each MFC: valve open, valve close, flow zero)
  • Digital Output Maximum Leakage Current OFF
  • Digital Output Minimum available current ON
  • Digital Output Protection
    5V TVS, resettable Fuse (25mA PTC)
  • Logic Level
    5V TTL tri state DO for valve override function
    Active HIGH and LOW.
    HIGH opens MFC control valve
    Low closes the valve and floating allows for set point to control
    5V TTL Active Low for valve close
    Valve open or Flow zero functions referenced to signal ground
  • Minimum Input Impedance
    150 kOhm
  • Maximum Power Consumption per Module
    Assuming each MFC consumes 250mA and all AOs are fully loaded ≥24V_IO@1.5Amp, 24V_CORE@ 0.15Amp
  • Timing
    Valve override 100msec + response time (Digital Output)
  • Operational Environment Temperature
    0 to +55°C
  • Storage Temperature
    -40 to 85°C
  • Altitude
    Up to 2000 meters
  • Humidity
    5 to 85% non-condensing
  • Dimensions
    52.5 x 125 x 92.3 mm (W x H x D)
  • Mounting
    DIN rail
  • Compliance
    UL, CE, RoHS


MKS Automation Platform

These modules are part of the MKS Automation Platform that provides a modular, scalable and configurable solution to meet your automation and control requirements. Designed to provide a complete automation solution to improve operational and productivity efficiencies, the Automation Platform enables faster implementations, provides lowest total cost of ownership, and improves utilization of existing tools and assets.

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