Compact I/O Controllers
Automation Platform Solutions for Semiconductor and Industrial Manufacturing
Our complete automation platform solution along with a suite of automation control hardware and software configurable modules allow semiconductor and other industrial manufacturing customers to better automate their processes through computer-controlled automation and seamlessly integrate with existing MKS products to provide a complete solution..
PAC Endpoint I/O
- Supports serial tool communication with web-based monitor & control
- Instant data monitoring with sampling rates up to 100 Hz
- Downloadable data via a web browser from local data storage
MicroNode™ Compact Networked I/O
- Built-in cLogic™ compiler allows low level sequence execution, I/O ramping and limited filtering
- A mixture of Digital and Analog I/O makes selection of a cost-effective product easy
- The MicroNode™ I/O package design and options makes installation flexible