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Description
im100a ip66-rated metal-sealed 50-100 slm mass flow controller IM100A Mass Flow Controller, IP66-rated, Metal-sealed, 50 - 100 slm

Specifications

  • Full Scale Flow Range
    50,000 to 100,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    50,000 - 100,000 sccm; 40 to 80 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale
    ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Rdg./°C
  • Inlet Pressure Coefficient
    <0.02% of Rdg./psi
  • Typical Settling Time
    <750 msec., typical above 10% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Valve Seat Material
    EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Surface Finish
    10µ inch average Ra (electropolished)
  • Enclosure Rating
    IP66
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    Voltage: (0 to 5 VDC) 15 pin Type "D" male
    Current: (4 to 20 mA) 15 pin Type "D" male
  • Profibus Input Power Required
    +15 to +24 VDC (<4 watts)
  • Profibus Connector
    9 pin Type D male (power)
    9 pin Type D female (comm.)
  • Profibus Data Rate Switch Selection
    Set Data Rate via Profibus - 9.6 Kbps to 12 Mbps
  • Profibus Digital I/O Network Size
    Up to 99 nodes
  • Profibus MAC ID Switches Addresses
    2 switches, 10 positions
  • Profibus Digital I/O Network Topology
    Master/slave
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

Analog and Profibus® I/O

The IM100A is a digitally controlled MFC with analog (0 to 5 VDC or 4-20 mA) and digital Profibus® I/O. The digital control electronics, using the latest in MKS control algorithms, provide fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The included digital calibration yields 1% of set point accuracy on the calibration gas.

Standard 3 inch Footprint

The IM100A utilizes the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.

Metal Sealed with Electropolished Internal Surface Finish

The IM100A metal sealed MFC, with its electropolished surface finish, is well suited for use in high purity process applications and is available with a normally closed valve. An mass flow meter version is also available and is not electropolished.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Resources

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