Specifications

  • Full Scale Flow Range
    50,000 to 100,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    50,000 - 100,000 sccm; 40 to 80 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20 to 100% Full Scale
    ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Rdg./°C
  • Inlet Pressure Coefficient
    <0.02% of Rdg./psi
  • Typical Settling Time
    <750 msec., typical above 10% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Valve Seat Material
    EPDM (Class VI), EPDM, Viton® (Class VI), Viton, Buna, or Neoprene
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
  • Surface Finish
    10µ inch average Ra (electropolished)
  • Enclosure Rating
    IP66
  • Power Requirements
    +15 to +24 VDC @ (<4 watts)
  • Flow Input Output Signal
    Voltage: (0 to 5 VDC) 15 pin Type "D" male
    Current: (4 to 20 mA) 15 pin Type "D" male
  • Profibus Input Power Required
    +15 to +24 VDC (<4 watts)
  • Profibus Connector
    9 pin Type D male (power)
    9 pin Type D female (comm.)
  • Profibus Data Rate Switch Selection
    Set Data Rate via Profibus - 9.6 Kbps to 12 Mbps
  • Profibus Digital I/O Network Size
    Up to 99 nodes
  • Profibus MAC ID Switches Addresses
    2 switches, 10 positions
  • Profibus Digital I/O Network Topology
    Master/slave
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Resources

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