Compare Description Drawings, CAD & Specs Availability Price
high power microwave plasma system
HMPX60Q-MKS
Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Quartz
6 Weeks
 HMPX60Q-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Quartz
6 Weeks
high power microwave plasma system
HMPX60S-MKS
Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire
6 Weeks
 HMPX60S-MKS Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire
6 Weeks

Specifications

  • Maximum Plasma Power Output
    6.0 kW
  • Frequency
    2,440-2,470 MHz
  • Ripple
    2,440-2,470 MHz
  • Output Accuracy
    <1% closed loop control
  • Ambient Temperature
    Up to 40°C max
  • Generator to Head Distance
    Up to 100 feet max
  • Microwave Connections
    WR284F waveguide with CPR284F flanges
  • Power Requirements
    200-208 VAC, 3 phase, 50/60 Hz
  • Autotune
    <1.5 seconds with <2% reflected power
  • Chemistries
    O2, N2H2, N2, H2O, NH3, H2
  • Applicator Material
    Quartz or Sapphire
  • Gas Flow Range
    1 - 10 slm
  • Operating Pressure
    1 - 10 Torr
  • Communications
    Analog, RS485
  • Compliance
    CE
  • Configuration
    KF40, custom
  • Cooling
    Water: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
  • Power Supply Generator Dimensions
    (7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
  • Power Head Magnetron Head Dimensions
    9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
  • Power Head Magnetron Head Cooling
    Water: 1 GPM, 20-30°C, 71 PSI max
  • Regulation
    Better than 1% of output power (line and load)

Resources

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