The E28H temperature regulated capacitance manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E28H Baratron® manometer is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability.
|Compare||Model||Drawings, CAD & Specs||Availability||Price|
|E28H.1TBF5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration||$2,914||
|E28H.1TDF5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration||$2,914||
|E28H11TBE1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration||$2,914||
|E28H11TDE2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED||
|E28HU5TBF6B Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Horizontal Calibration, Status LED||$3,177||
The following options are available for E28H Baratron® Heated Absolute Capacitance Manometers
Ordering Code Example: E28H01TBE1B
|Configuration Option||Option Code|
|E28H Absolute Capacitance Manometer.||E28H|
Full Scale Range
|0.5 in. OD Tube||A|
|8 VCR female||B|
|1.33 in. OD CF||C|
|8 VCO female||E|
|2.75 in. OD CF||L|
|0.25% of Reading||E|
|0.50% of Reading||F|
|Standard Configuration, vertical calibration||1|
|Temperature/Heater Status, vertical calibration||2|
|Standard Configuration, horizontal calibration (ranges <1 Torr only)||5|
|Temperature/Heater Status, horizontal calibration (ranges <1 Torr only)||6|
|15 pin Type "D" with Thread Locks||B|
|15 pin Type "D" with Slide Locks||P|
Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.
These capacitance manometers are temperature controlled to 100°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.
These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.
These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.
These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.
MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.