Sorry, this family of products is no longer available. The replacement family of products is 631F 1-1000 Torr Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer.
The 631D 1-1000 Torr, Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer is available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD).
Pin | Description |
---|---|
1 | Trip Point A Relay N/O |
2 | Pressure Output |
3 | Trip Point A Relay Common |
4 | Trip Point A Relay N/C |
5 | Power Return |
6 | -15 VDC |
7 | +15 VDC |
8 | Trip Point B Relay N/O |
9 | Trip Point B Relay Common |
10 | Trip Point B Relay N/C |
11 | Heater Alarm Relay Common |
12 | Pressure Output Return |
13 | Heater Alarm Relay Open (when energized) |
15 | Heater Alarm Relay Closed (when energized) |
15 | Chassis Ground |