Sorry, this family of products is no longer available. The recommended replacement product is 631f-heated-absolute-capacitance-manometers.
631D 1-1000 Torr Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer
631D 1-1000 Torr Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer
The 631D 1-1000 Torr, Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer is available operating temperatures are 150°C or 200°C, permitting use in the most demanding vacuum processes in semiconductor manufacturing such as metal etching and nitride film chemical vapor deposition (CVD).
Specifications
- TypePressure Transducer
- Sensor TypeCapacitance Manometer
- Measurement TypeAbsolute
- Full Scale Pressure Ranges1, 2, 10, 30, 100, and 1000 Torr
- Sensor TemperatureControlled to 150°C or 200°C
- Accuracy0.50% of Reading
- Analog Output0-10 VDC into >10 kΩ load
- Analog Connector15-pin D-sub
- Trip RelaysTwo internally mounted process pressure trip relays independently adjustable from 0.5% to 100% of full scale range
- Resolution0.01% of Full Scale
- Zero Temperature Coefficient150°C Versions:0.004% FS/°C (0.008% Full Scale/°C for 1 Torr range)
200°C Versions: 0.008% FS/°C (0.016% Full Scale/°C for 1 Torr range)
- Span Temperature Coefficient0.02% of Reading/°C
- Response Time50 msec
- Warm-up Time4 hours
- Internal Volume6.3 cc
- Ambient Operating Temperature15° to 50°C
- Overpressure Limit45 psia (310 kPa)
- Materials Exposed to Process GasesInconel® or Incoloy® nickel alloys
- Power Requirements±15 VDC (±5%) @ 1.0 amps max.
- Ambient Airflow Requirements150°C Versions: 50 ft/min for ambient temperatures of 45-50°C
200°C Versions: 150 ft/min for ambient temperatures of 45-50°C - ComplianceCE
Features
15-pin Type "D" Pin-Outs with Relay Option
| Pin | Description |
|---|---|
| 1 | Trip Point A Relay N/O |
| 2 | Pressure Output |
| 3 | Trip Point A Relay Common |
| 4 | Trip Point A Relay N/C |
| 5 | Power Return |
| 6 | -15 VDC |
| 7 | +15 VDC |
| 8 | Trip Point B Relay N/O |
| 9 | Trip Point B Relay Common |
| 10 | Trip Point B Relay N/C |
| 11 | Heater Alarm Relay Common |
| 12 | Pressure Output Return |
| 13 | Heater Alarm Relay Open (when energized) |
| 15 | Heater Alarm Relay Closed (when energized) |
| 15 | Chassis Ground |
Accessories
Compatible Cables
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | RCB259S-5-10Manometer Cable, 651, 655, PR4000 Controllers to 631, 624, 625, 626, 627, 628, 722 (15 pin) Manometers, DB15, 10 ft., RoHS, Shielded |
Power Supplies and Displays
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | PR4000BF2V3Digital Power Supply, Display, 2 Channel, RS232, ±24VDC, 1.0 Amp | |||||
| PR4000BF5V3Digital Power Supply, Display, 2 Channel, RS485, ±24VDC, 1.0 Amp | |||||
| PR4000BS2V2Digital Power Supply, Display, 1 Channel, RS232, ±15VDC, 1.5 Amp | |||||
| PR4000BS2V3Digital Power Supply, Display, 1 Channel, RS485, ±24VDC, 1.0 Amp | |||||
| PR4000BF2V2Digital Power Supply, Display, 2 Channel, RS232, ±15VDC, 1.5 Amp | In Stock | ||||
| PR4000BF5V2Digital Power Supply, Display, 2 Channel, RS485, ±15VDC, 1.5 Amp | |||||
 | PDR2000AODigital Power Supply, Display, 2 Channels, RS232, ±15 VDC, 0.75 Amp | In Stock |
Resources
Manuals
631B Baratron® Heated Absolute Capacitance Manometer User Manual(645.7 kB, PDF) 631D Baratron® Heated Absolute Capacitance Manometers (1039281-001)(736 kB, PDF) 631C Baratron® Heated Absolute Capacitance Manometer Manual(649.6 kB, PDF) 631 Capacitance Manometer Pin-outs(27.2 kB, PDF)