422 Cold Cathode Vacuum/Pressure Sensor
Overview
The internal design of the 422 Cold Cathode Vacuum/Pressure Sensor has been carefully constructed using only materials suitable for UHV conditions. Combined with Inverted Magnetron technology, this sensor has the capability of measuring down to 1 x 10-11 Torr. The 422 Cold Cathode Sensor incorporates LEMO® connectors, these connectors use PEEK for the insulators which allows a sensor to be both bakeable and radiation resistant. Maximum bakeout temperature is 250°C while operating. In addition, MKS offers cables that are bakeable and radiation resistant (no Teflon).
The 422 sensor is ideally suited for High Energy Physics applications.
- Pressure measurement from 10-2 to 10-11 Torr
- Bakeable to 250°C while operating
- Radiation resistant
Products
Specifications
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Sensor TypeCold Cathode
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Measurement Range1.0 x 10-11 to 1.0 x 10-2 Torr
1.3 x 10-11 to 1.3 x 10-2 mbar
1.3 x 10-9 to 1.3 Pascal -
Fitting TypeConflat
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Flange Size2.75 inch CF
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Set Point Range2.0 x 10-10 to 9.5 x 10-3 Torr
2.7 x 10-10 to 1.2 x 10-2 mbar
2.7 x 10-8 to 1.2 Pascal -
Resolution1% of indicated decade, except 10% below 10-10 Torr and above 10-3 Torr
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ConnectorsLEMO
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Reproducibility5% of indicated pressure
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Exposed MaterialsStainless steel, silver-copper brazing alloy, alumina ceramics, aluminum AL 6061, Elgiloy®, OFHC® copper
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Bake Out Temperature0-250°C (32-482°F)
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Operating Temperature0-250°C (32-482°F)
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ConnectorLEMO
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Internal Volume1.8 in3 (30 cm3) max
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Weight2.9 lbs. (1.3 Kg) with CF Flange
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Set Point Response120 ms (<10ms with CL card)
Resources
Literature
- 937B UHV (Ultra High Vacuum) Gauging for High Energy Physics (300.7 kB, PDF)
Ultra-High Velocity