Dissolved Ammonia Delivery System
Overview
The DI-Solverâ„¢ NH3 is a compact, stand-alone system designed to provide dissolved ammonia water for use in rinsing processes in the semiconductor industry. With Semiconductor 3D IC architectures using new materials like Cu-Co and Si-SiGe, the ability to wet clean with precise alkaline chemistries is growing in frequency and importance. The system is specifically designed to provide optimal cleaning capability at a given conductivity. The alkaline chemistry of dissolved ammonia provides ESD protection during rinsing, particle lift-off, and residual particle removal. It also prevents corrosion of metal interfaces, which is a common problem in semiconductor manufacturing. The system uses closed-loop control to keep conductivity and pressure stable under changing flow conditions. It also monitors and adjusts the NH4OH concentration to deliver the desired level of dissolved ammonia.
MKS' Di-Solver NH3 leverages the established and proven architecture of LIQUOZON® VariO3 Ozonated Water Delivery System, integrating high purity standard materials and safety features in a rugged system to meet the demands of advanced technology manufacturing.
- Best dynamic conductivity control and accuracy at point of use from proprietary control of gas
- Increases yields by inhibiting Electro Static Discharge
- Improves interconnect reliability and yield by preventing metal surface and post CMP clean corrosion
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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DI-NH3 Water Delivery System, Ammonia Water |
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Specifications
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Outlet PressureConfigurable 1.0-3.0 barg (3.7barg with outlet pump)
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Plumbing MaterialsLiquid Wetted Surfaces: PFA, PTFE, quartz glass
Gas Wetted Surfaces: 316L stainless steel, PFA, PTFE -
CommunicationBinary in/out, RS232/RS485, analog 4-20 mA in/out, USB
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DimensionsCoated steel, approximately 1810 mm high, 800 mm wide, 610 mm deep (71.2 x 31.5 x 24.1 in.)
Overall height: approx. 2000 mm (79 in.) -
Weight290-300 kg, depending on configuration
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ComplianceCE, SEMI S2, SEMI F47, NRTL
Features
Benefits
Leading Technology
- Patented system to deliver dilute NH4OH based on ammonia gas ultra-pure water mixing
- Precise gas dosage through proprietary mass flow controller system
Process
- Precise conductivity control range of 5 to 121Â μS/cm
- Up to 40 lpm flow
- Stable setpoint at varying flow rates
- Analog and digital communication with remote control
Reliability & Maintenance
- Repeatable unit to unit performance
- Field proven sub-components life
- Easy installation and operation
Performance & Operation
MKS’ DI-Solver NH3 leverages the established and proven architecture of LIQUOZON® Ozonated Water Delivery System, integrating high purity standard materials and safety features in a rugged system to meet the demands of advanced technology manufacturing.
The below figures show the possible performance ranges of different configurations that provide a conductivity range of 5 to 40 μS/cm at 0.5 to 40 lpm (Figure 1), or 5-121 μS/cm at 0.5 to 32 lpm (Figure 2).
Figure 1 - Conductivity range of 5 to 40 µS/cm at 0.5 to 40 lpm
Figure 2 - Conductivity range of 5-121 µS/cm at 0.5 to 32 lpm
Specified achievable dissolved ozone concentration in UPW for a system pressure of 2.5 barg, a cooling water temperature and UPW temperature of 20°C.
Facility Requirements
N2: ≥ Grade 4 (purity ≥ 99.99%), dew point <-40°C
- Inlet Pressure: 4.5-7.6 barg (65-110 psig), at least higher 3 bar than system pressure
- Standard Flow Rate: ≤10 slm, according to SEMI E12 (0°C / 1.01325 bar)
Ammonia (NH3): ≥ Grade 4.5 (purity ≥ 99.995%)
- Inlet Pressure: 3.0-5.0 barg (44-73 psig)
- Standard Flow Rate: ≤ 2.0 slm, according to SEMI E12 (0°C / 1.01325 bar)
Ultra-Pure Water (UPW): <0.1 ppb metals, <10 particles/ml of 0.1µm size, free of organics
- UPW IN Pressure: 1.3-4 barg (14.5-73 psig), at least 1.3 bar higher than system pressure
- Temperature: 20-25°C (59-77°F), rated 20°C (68°F)
Clean Dry Air (CDA): Filtration, free of oils and particles
- Pressure: 6.0-8, 3 barg (87-120 psig)
- Flow Rate: ≤ 15 slm, typically 10.0 slm according to SEMI E12 (0°C / 1.01325 bar)
Exhaust:
- Cabinet Underpressure: >8mm (0.32 in.) water column
- Standard Flow Rate: >70m3/h, acc to SEMI S6 (21.1°C / 1.01325 bar)
Power: 200-208 V ±10%
Resources
Drawings & CADs
- DI-NH3 Dimensional Drawing (1 MB, PDF)
Ultra-High Velocity