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DI-NH3 Dissolved Ammonia Delivery System
Water Delivery System, Ammonia Water

Specifications

  • Outlet Pressure
    Configurable 1.0-3.0 barg (3.7barg with outlet pump)
  • Plumbing Materials
    Liquid Wetted Surfaces: PFA, PTFE, quartz glass
    Gas Wetted Surfaces: 316L stainless steel, PFA, PTFE
  • Communication
    Binary in/out, RS232/RS485, analog 4-20 mA in/out, USB
  • Dimensions
    Coated steel, approximately 1810 mm high, 800 mm wide, 610 mm deep (71.2 x 31.5 x 24.1 in.)
    Overall height: approx. 2000 mm (79 in.)
  • Weight
    290-300 kg, depending on configuration
  • Compliance
    CE, SEMI S2, SEMI F47, NRTL

Features

Benefits

Leading Technology

  • Patented system to deliver dilute NH4OH based on ammonia gas ultra-pure water mixing
  • Precise gas dosage through proprietary mass flow controller system

Process

  • Precise conductivity control in range from 5 to 40 ìS/cm
  • Up to 40 lpm flow
  • Stable setpoint at varying flow rates
  • Analog and digital communication with remote control

Reliability & Maintenance

  • Repeatable unit to unit performance
  • Field proven sub-components life
  • Easy installation and operation

Performance & Operation

Specified achievable dissolved ammonia conductivity in UPW for a system pressure of up to 2.5 barg, UPW temperature of 20°C.

DI-NH3 Flow [L/min] DI-NH3 Conductivity [µS/cm]
minimum maximum
0.5 5 40
5 5 40
10 5 40
20 5 40
30 5 40
40 5 40

Facility Requirements

N2: Grade 4 (purity .99.99%), dew point <-40°C

  • Inlet Pressure 4.5 - 7.6 barg (65 - 110 psig), at least higher 3 bar than system pressure
  • Standard Flow Rate .10 slm, according to SEMI E12 (0°C / 1.01325 bar)

Ammonia (NH3): Grade 4.5 (purity .99.995%)

  • Inlet Pressure 3.0 . 5.0 barg (44 - 73 psig)
  • Standard Flow Rate .2.0 slm, according to SEMI E12 (0°C / 1.01325 bar)

Ultra-Pure Water (UPW): <0.1 ppb metals, <10 particles/ml of 0.1µm size, free of organics

  • UPW IN Pressure 1.3 - 4 barg (14.5 - 73 psig), at least 1.3 bar higher than system pressure
  • Temperature 20 . 25°C (59 . 77°F), rated 20°C (68°F)

Clean Dry Air (CDA): Filtration, free of oils and particles

  • Pressure 6.0 . 8, 3 barg (87 . 120 psig)
  • Flow Rate .15 slm, typically 10.0 slm according to SEMI E12 (0°C / 1.01325 bar)

Exhaust:

  • Cabinet Underpressure >8mm (0.32 in.) water column
  • Standard Flow Rate >70m3/h, acc to SEMI S6 (21.1°C / 1.01325 bar)

Power: 3/PE~, 200 - 208 V } 10 %, 50/60 Hz, collective 1050 W

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