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Vacuum Valve Rebuild Kits

Internal replacement parts for vacuum valves
Service or maintain a vacuum valve
Spare parts for limited downtime

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	Compare	Description		Avail.	Price	Qty.
		100012029 Valve Rebuild Kit, 24 VDC Solenoid, Normally Closed, Viton O-Rings, ECv Valve		4 Weeks	$513		100012029 Valve Rebuild Kit, 24 VDC Solenoid, Normally Closed, Viton O-Rings, ECv Valve 4 Weeks $513
		100008311 Valve Rebuild Kit with Viton O-Rings, Toggle-actuated CV, IDA Vacuum Valves		4 Weeks	$315		100008311 Valve Rebuild Kit with Viton O-Rings, Toggle-actuated CV, IDA Vacuum Valves 4 Weeks $315
		100010491 Valve Rebuild Kit, Viton O-Rings, Manual CV Valves		4 Weeks	$300		100010491 Valve Rebuild Kit, Viton O-Rings, Manual CV Valves 4 Weeks $300
		100004937 Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves		4 Weeks	$300		100004937 Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves 4 Weeks $300
		100012030 Valve Rebuild Kit, 24 VDC Solenoid, Normally Open, Viton O-Rings, ECv Valves		4 Weeks	$662		100012030 Valve Rebuild Kit, 24 VDC Solenoid, Normally Open, Viton O-Rings, ECv Valves 4 Weeks $662

Viewing5 of 15 Products | View All 15 Products

Vacuum Valve Rebuild Kits

CF UHV Protective Flange Caps

Plastic flange protector caps
Fits 1 1/3, 2 1/8, 2 3/4, or 3 3/8 in. flanges
Protect CF flange faces

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	Compare	Description		Avail.	Price	Qty.
		100003048 Flange Protective Cap, Size 3.375 inch CF Vacuum Flange, Plastic		2 Weeks	$2.44		100003048 Flange Protective Cap, Size 3.375 inch CF Vacuum Flange, Plastic 2 Weeks $2.44
		100003049 Flange Protective Cap, Size 2.75 inch CF Vacuum Flange, Plastic		2 Weeks	$1.76		100003049 Flange Protective Cap, Size 2.75 inch CF Vacuum Flange, Plastic 2 Weeks $1.76
		100005285 Flange Protective Cap, Size 2.125 inch CF Vacuum Flange, Plastic		Contact Us	$2.16		100005285 Flange Protective Cap, Size 2.125 inch CF Vacuum Flange, Plastic Contact Us $2.16

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CF UHV Protective Flange Caps

CF UHV Flange to Female VCR Adapters

Adapt to VCR® compatible components
Fits 1 1/3, 2 1/8, 2 3/4, or 3 3/8 in. flanges
CF flange with bolt thru-holes

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	Compare	Description		Avail.	Price	Qty.
		100881049 CF Flange Adapter, 1.33 in. Flange to 0.25 inch Female VCR Fitting		5 Weeks	$105		100881049 CF Flange Adapter, 1.33 in. Flange to 0.25 inch Female VCR Fitting 5 Weeks $105
		100882032 CF Flange Adapter, 2.125 in. Flange to 0.25 inch Female VCR Fitting		Contact Us	$255		100882032 CF Flange Adapter, 2.125 in. Flange to 0.25 inch Female VCR Fitting Contact Us $255
		100882033 CF Flange Adapter, 2.125 in. Flange to 0.50 inch Female VCR Fitting		Contact Us	$377		100882033 CF Flange Adapter, 2.125 in. Flange to 0.50 inch Female VCR Fitting Contact Us $377
		100882036 CF Flange Adapter, 2.125 in. Flange to 0.75 inch Female VCR Fitting		Contact Us	$650		100882036 CF Flange Adapter, 2.125 in. Flange to 0.75 inch Female VCR Fitting Contact Us $650
		100883054 CF Flange Adapter, 2.75 in. Flange to 0.25 inch Female VCR Fitting		2 Weeks	$195		100883054 CF Flange Adapter, 2.75 in. Flange to 0.25 inch Female VCR Fitting 2 Weeks $195

Viewing5 of 10 Products | View All 10 Products

CF UHV Flange to Female VCR Adapters

CF Flange to Male VCR Adapters

Adapt to VCR® compatible components
Fits 1 1/3, 2 1/8, 2 3/4, or 3 3/8 in. flanges
CF flange with bolt thru-holes

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	Compare	Description		Avail.	Price	Qty.
		100881050 CF Flange Adapter, 1.33 in. Flange to 0.25 inch Male VCR Fitting		4 Weeks	$105		100881050 CF Flange Adapter, 1.33 in. Flange to 0.25 inch Male VCR Fitting 4 Weeks $105
		100882031 CF Flange Adapter, 2.125 in. Flange to 0.25 inch Male VCR Fitting		Contact Us	$332		100882031 CF Flange Adapter, 2.125 in. Flange to 0.25 inch Male VCR Fitting Contact Us $332
		100882034 CF Flange Adapter, 2.125 in. Flange to 0.50 inch Male VCR Fitting		Contact Us	$301		100882034 CF Flange Adapter, 2.125 in. Flange to 0.50 inch Male VCR Fitting Contact Us $301
		100882035 CF Flange Adapter, 2.125 in. Flange to 0.75 inch Male VCR Fitting		Contact Us	$656		100882035 CF Flange Adapter, 2.125 in. Flange to 0.75 inch Male VCR Fitting Contact Us $656
		100883055 CF Flange Adapter, 2.75 in. Flange to 0.25 inch Male VCR Fitting		2 Weeks	$115		100883055 CF Flange Adapter, 2.75 in. Flange to 0.25 inch Male VCR Fitting 2 Weeks $115

Viewing5 of 10 Products | View All 10 Products

CF Flange to Male VCR Adapters

paragon 8.0 slm nf3 flow intelligent remote plasma source

Paragon® 8.0 slm NF₃ Flow Intelligent Remote Plasma Source

Up to 8 slm NF flow, in a compact size enables faster clean times
Best in Class dissociation (>95%) for efficient uniform cleaning results
EtherCAT intelligent data reporting for faster, tighter device operation

paragon 8.0 slm nf3 flow intelligent remote plasma source

Paragon® 8.0 slm NF₃ Flow Intelligent Remote Plasma Source

253b exhaust throttle valve

253B Exhaust Throttle Valves

253b exhaust throttle valve

253B Exhaust Throttle Valves

CF ConFlat Flange 4-Way Cross Fitting

CF Flange 4-Way Cross Fittings

4-way crosses for branching
Two rotatable and two non-rotatable flanges
1 1/3 inch to 3 3/8 inch CF flange size

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	Compare	Description		Avail.	Price	Qty.
		100881029 4-Way Cross Fitting, 1.33 inch CF Flanges, 304 Stainless Steel		Contact Us			100881029 4-Way Cross Fitting, 1.33 inch CF Flanges, 304 Stainless Steel Contact Us
		100882043 4-Way Cross Fitting, 2.125 inch CF Flanges, 304 Stainless Steel		4 Weeks	$913		100882043 4-Way Cross Fitting, 2.125 inch CF Flanges, 304 Stainless Steel 4 Weeks $913
		100883029 4-Way Cross Fitting, 2.75 inch CF Flanges, 304 Stainless Steel		5 Weeks	$417		100883029 4-Way Cross Fitting, 2.75 inch CF Flanges, 304 Stainless Steel 5 Weeks $417
		100884013 4-Way Cross Fitting, 3.375 inch CF Flanges, 304 Stainless Steel		Contact Us			100884013 4-Way Cross Fitting, 3.375 inch CF Flanges, 304 Stainless Steel Contact Us

Viewing4 of 4 Products | View All 4 Products

CF ConFlat Flange 4-Way Cross Fitting

CF Flange 4-Way Cross Fittings

CF Flange Elbow Fitting

CF Flange Smooth Radius 90 Degree Elbow Fittings

90° elbows with radius equal to pipe diameter
Both flanges are rotatable
1 1/3 inch to 4 5/8 inch CF flange size

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	Compare	Description		Avail.	Price	Qty.
		100881030 90 Degree Elbow Fitting, 1.33 inch CF Flange, Smooth Radius		4 Weeks	$164		100881030 90 Degree Elbow Fitting, 1.33 inch CF Flange, Smooth Radius 4 Weeks $164
		100882039 90 Degree Elbow Fitting, 2.125 inch CF Flange, Smooth Radius		Contact Us			100882039 90 Degree Elbow Fitting, 2.125 inch CF Flange, Smooth Radius Contact Us
		100883030 90 Degree Elbow Fitting, 2.75 inch CF Flange, Smooth Radius		4 Weeks	$277		100883030 90 Degree Elbow Fitting, 2.75 inch CF Flange, Smooth Radius 4 Weeks $277
		100884014 90 Degree Elbow Fitting, 3.375 inch CF Flange, Smooth Radius		Contact Us			100884014 90 Degree Elbow Fitting, 3.375 inch CF Flange, Smooth Radius Contact Us
		100885018 90 Degree Elbow Fitting, 4.5 inch CF Flange, Smooth Radius		Contact Us	$402		100885018 90 Degree Elbow Fitting, 4.5 inch CF Flange, Smooth Radius Contact Us $402

Viewing5 of 6 Products | View All 6 Products

CF Flange Elbow Fitting

CF Flange Smooth Radius 90 Degree Elbow Fittings

CF Flange Smooth Radius 45 Degree Elbow Fittings

45° elbows with radius equal to pipe diameter
Two rotatable thru-hole CF flanges
1 1/3 inch to 4 5/8 inch CF flange size

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	Compare	Description		Avail.	Price	Qty.
		100881052 45 Degree Elbow Fitting, 1.33 inch CF Flange, Smooth Radius		Contact Us	$137		100881052 45 Degree Elbow Fitting, 1.33 inch CF Flange, Smooth Radius Contact Us $137
		100882038 45 Degree Elbow Fitting, 2.125 inch CF Flange, Smooth Radius		Contact Us			100882038 45 Degree Elbow Fitting, 2.125 inch CF Flange, Smooth Radius Contact Us
		100883061 45 Degree Elbow Fitting, 2.75 inch CF Flange, Smooth Radius		4 Weeks	$214		100883061 45 Degree Elbow Fitting, 2.75 inch CF Flange, Smooth Radius 4 Weeks $214
		100884039 45 Degree Elbow Fitting, 3.375 inch CF Flange, Smooth Radius		Contact Us			100884039 45 Degree Elbow Fitting, 3.375 inch CF Flange, Smooth Radius Contact Us
		100885037 45 Degree Elbow Fitting, 4.5 inch CF Flange, Smooth Radius		Contact Us			100885037 45 Degree Elbow Fitting, 4.5 inch CF Flange, Smooth Radius Contact Us

Viewing5 of 6 Products | View All 6 Products

CF Flange Smooth Radius 45 Degree Elbow Fittings

CF Non-Rotatable Blank UHV Flanges

Non-rotatable single-sided CF flange
Blank to close off unused CF ports
Tapped or thru flange bolt holes

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	Compare	Description		Avail.	Price	Qty.
		100881000 Blank CF Flange, 1.33 in., Nonrotatable, Thru Bolt Holes		1 Week	$37		100881000 Blank CF Flange, 1.33 in., Nonrotatable, Thru Bolt Holes 1 Week $37
		100881007 Blank CF Flange, 1.33 in., Nonrotatable, 8-32 Tapped Holes		Contact Us	$30		100881007 Blank CF Flange, 1.33 in., Nonrotatable, 8-32 Tapped Holes Contact Us $30
		100882000 Blank CF Flange, 2.125 in., Nonrotatable, Thru Bolt Holes		4 Weeks	$509		100882000 Blank CF Flange, 2.125 in., Nonrotatable, Thru Bolt Holes 4 Weeks $509
		100882005 Blank CF Flange, 2.125 in., Nonrotatable, 1/4-28 Tapped Holes		4 Weeks	$53		100882005 Blank CF Flange, 2.125 in., Nonrotatable, 1/4-28 Tapped Holes 4 Weeks $53
		100883000 Blank CF Flange, 2.75 in., Nonrotatable, Thru Bolt Holes		1 Week	$63		100883000 Blank CF Flange, 2.75 in., Nonrotatable, Thru Bolt Holes 1 Week $63

Viewing5 of 12 Products | View All 12 Products

CF Non-Rotatable Blank UHV Flanges

CF Rotatable Blank UHV Flanges

Rotatable single-sided CF flange
Blank to close off unused CF ports
Tapped or thru flange bolt holes

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	Compare	Description		Avail.	Price	Qty.
		100881014 Blank CF Flange, 1.33 in., Rotatable, Thru Bolt Holes		6 Weeks	$42		100881014 Blank CF Flange, 1.33 in., Rotatable, Thru Bolt Holes 6 Weeks $42
		100881021 Blank CF Flange, 1.33 in., Rotatable, 8-32 Tapped Holes		Contact Us			100881021 Blank CF Flange, 1.33 in., Rotatable, 8-32 Tapped Holes Contact Us
		100882010 Blank CF Flange, 2.125 in., Rotatable, Thru Bolt Holes		Contact Us	$59		100882010 Blank CF Flange, 2.125 in., Rotatable, Thru Bolt Holes Contact Us $59
		100882015 Blank CF Flange, 2.125 in., Rotatable, 1/4-28 Tapped Holes		Contact Us			100882015 Blank CF Flange, 2.125 in., Rotatable, 1/4-28 Tapped Holes Contact Us
		100883014 Blank CF Flange, 2.75 in., Rotatable, Thru Bolt Holes		Contact Us	$62		100883014 Blank CF Flange, 2.75 in., Rotatable, Thru Bolt Holes Contact Us $62

Viewing5 of 12 Products | View All 12 Products

CF Rotatable Blank UHV Flanges

CF Rotatable UHV Flanges

Rotatable single-sided CF flange
Compatible with standard inch tubing diameters
Tapped or thru flange bolt holes

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	Compare	Description		Avail.	Price	Qty.
		100881018 CF Flange, 1.33 in., 0.75 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes		2 Weeks	$45		100881018 CF Flange, 1.33 in., 0.75 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes 2 Weeks $45
		100881025 CF Flange, 1.33 in., 0.75 in. O.D. Tube Bore, Rotatable, 8-32 Tapped Holes		Contact Us	$73		100881025 CF Flange, 1.33 in., 0.75 in. O.D. Tube Bore, Rotatable, 8-32 Tapped Holes Contact Us $73
		100882011 CF Flange, 2.125 in., 0.25 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes		Contact Us	$469		100882011 CF Flange, 2.125 in., 0.25 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes Contact Us $469
		100882012 CF Flange, 2.125 in., 0.5 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes		4 Weeks	$152		100882012 CF Flange, 2.125 in., 0.5 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes 4 Weeks $152
		100882013 CF Flange, 2.125 in., 0.75 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes		7 Weeks	$59		100882013 CF Flange, 2.125 in., 0.75 in. O.D. Tube Bore, Rotatable, Thru Bolt Holes 7 Weeks $59

Viewing5 of 36 Products | View All 36 Products

CF Rotatable UHV Flanges

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