Comprehensive repair and service programs maximize the value of your installed base of critical subcomponents to ensure you...
Our global network of 18 MKS Service Centers located throughout North America, Europe, and Asia-Pacific ensure that you have direct access to repair, refurbishment, and calibration services when and where you need them. MKS service programs address your operational efficiency while offering flexibility as your requirements change.
Unexpected repairs and ongoing maintenance issues can disrupt productivity and have a negative impact on budgets. Our fixed-price repair programs help you avoid these unforeseen circumstances.
Fixed-price calibration services ensure that you maintain the performance of MKS valves, pressure sensors, and mass flow controllers.
MKS factory-certified technicians complete a comprehensive refurbishment and test process developed by the original product design engineers to ensure that your refurbished MKS components perform like new.
Power Generator Refurbishment Program (PDF )
Remote Plasma Refurbishment Program (PDF )
AX8407 SEMOZON® Ozone Generator Refurbishment Program (PDF )
Learn more about our comprehensive repair and service programs.
Details about our repair, calibration, and refurbishment programs.
Complete this form when making a return.
Complete and include this form when sending equipment to us for calibration and/or repair.
Instructions and options for ordering MKS repair and calibration services.
Contact MKS by sending us an email