T-Series Advanced IR Gas Analyzer for Process Monitoring
Model: t-series-ir-gas-analyzer
T-Series Advanced IR Gas Analyzer for Process Monitoring
Model: t-series-ir-gas-analyzer
Technical Specs
Type
IR Gas Analyzer
Measurement Technique
IR absorption using Tunable Filter Spectrometry
Measurable Gases & Vapors
SiF4, CO2, WF6, and SiF4 & CO2 (dual gas measurement)
Other gases available (measurement feasibility dependent on sample matrix)
Gas Cell Pathlength
15 cm (standard), contact MKS for custom length
Update rate
1-20 seconds (software configurable)
Calibration
Factory calibrated; no recalibration required
Optics Purge Flow
Dry nitrogen or air
(required for measurement certain gases; contact MKS)
Power Requirements
120 VAC, 230 VAC, or 24 VDC (2 amp)
Dimensions
Sensor Head: 16.0 x 6.0 x 5.4 in. (407 x 153 x 137 mm)
(for 15 cm cell with KF40 fitting)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm)
Weight
7 lbs. (3.2kg)
Analog Output
Analog 1: 0 - 10 V (user configurable)
Analog 2: 0 - 10 V (user configurable)
Sample Pressure
0.5 - 760 Torr (other ranges available)
Sample Temperature
20 - 60°C
Fittings
NW25 (other sizes available upon request)
Fault Indicator
Digital Output 1
Service Port
Digital Diagnostic Codes
Connector
DB15
Communication
Modbus TCP/IP
Technical Specs
Type
IR Gas Analyzer
Measurement Technique
IR absorption using Tunable Filter Spectrometry
Measurable Gases & Vapors
SiF4, CO2, WF6, and SiF4 & CO2 (dual gas measurement)
Other gases available (measurement feasibility dependent on sample matrix)
Gas Cell Pathlength
15 cm (standard), contact MKS for custom length
Update rate
1-20 seconds (software configurable)
Calibration
Factory calibrated; no recalibration required
Optics Purge Flow
Dry nitrogen or air
(required for measurement certain gases; contact MKS)
Power Requirements
120 VAC, 230 VAC, or 24 VDC (2 amp)
Dimensions
Sensor Head: 16.0 x 6.0 x 5.4 in. (407 x 153 x 137 mm)
(for 15 cm cell with KF40 fitting)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm)
Weight
7 lbs. (3.2kg)
Analog Output
Analog 1: 0 - 10 V (user configurable)
Analog 2: 0 - 10 V (user configurable)
Sample Pressure
0.5 - 760 Torr (other ranges available)
Sample Temperature
20 - 60°C
Fittings
NW25 (other sizes available upon request)
Fault Indicator
Digital Output 1
Service Port
Digital Diagnostic Codes
Connector
DB15
Communication
Modbus TCP/IP
