150/160 Series Soft-start Bellows Vacuum Isolation Valves
Model: V2
150/160 Series Soft-start Bellows Vacuum Isolation Valves
Model: V2

Overview
Overview
The V2 Two-stage Soft Start Bellows-sealed Isolation Valve achieve a soft pumpdown and vacuum system isolation in one common housing. A small bypass valve is integrated into the main isolation valve, simplifying setup and reducing costs. With the integrated soft pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage. The bypass valve can be user adjustable by selecting a micrometer or thumb screw adjustment option. Additionally, a fixed flow orifice can be sized for the application that is housed internal to the valve to prevent unwanted adjustment. These legacy valves are supported by MKS for configurations not supported by the LoPro™ product line. For increased cycle life and reduced size, please see the MKS LoPro™ Two-Stage products.
Technical Specs
- Type2-Stage Valve
- Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
- Body ConfigurationInline
- Port SizeNW100
- Flange Size6.0 in.
- Flange TypeTube
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationMicometer Head
- Limit SwitchNo
- SealChemraz
- Cylinder VolumeMain: 3.6 in3 (59 cm3), Bypass: 0.25 in3, (4.1 cm3)
- Limit Switch Rating5A, 250 VAC
- Single Pole, Single Throw5 Amps, 30 VDC
- Solenoid Voltage220 VAC 50/60 Hz
- Blow-By PressureMain: 60 psia, Bypass: 45 psia
- Actuation TimeMain: Opening: 500 msec, Closing: 1,000 msec, Bypass Closing: 100 msec
- Maximum Internal Spring Closing PressureMain: 43 psia, Bypass: 40 psia
- Maximum Bakeout Temperature150°C (body)
- Temperature ConfigurationRegular
- Suggested Nominal Pressure Supply65 psig
- Bypass Orifice0.225, 0.063, 0.125, 0.187 in. and custom
- Weight3.0 - 38.5 lb (1.4 -17.5 kg) depending on configuration
Technical Specs
- Type2-Stage Valve
- Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
- Body ConfigurationInline
- Port SizeNW100
- Flange Size6.0 in.
- Flange TypeTube
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationMicometer Head
- Limit SwitchNo
- SealChemraz
- Cylinder VolumeMain: 3.6 in3 (59 cm3), Bypass: 0.25 in3, (4.1 cm3)
- Limit Switch Rating5A, 250 VAC
- Single Pole, Single Throw5 Amps, 30 VDC
- Solenoid Voltage220 VAC 50/60 Hz
- Blow-By PressureMain: 60 psia, Bypass: 45 psia
- Actuation TimeMain: Opening: 500 msec, Closing: 1,000 msec, Bypass Closing: 100 msec
- Maximum Internal Spring Closing PressureMain: 43 psia, Bypass: 40 psia
- Maximum Bakeout Temperature150°C (body)
- Temperature ConfigurationRegular
- Suggested Nominal Pressure Supply65 psig
- Bypass Orifice0.225, 0.063, 0.125, 0.187 in. and custom
- Weight3.0 - 38.5 lb (1.4 -17.5 kg) depending on configuration
