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10kW Pulsed DC Plasma Generator
Model: RPDG-100
10kW Pulsed DC Plasma Generator
Model: RPDG-100
Overview
Overview
The RPDG-100 is a 100 kW Asymmetric Bipolar Pulsed DC generator that enables deposition of a wide variety of low defect films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN. RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPDG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.
Technical Specs
- TypePulsed DC Generator
- Frequency25 - 125 kHz or 50 - 250 kHz
- Duty Cycle0 - 40% (Reverse Bias)
- Power Output10 kW
- Power Limit10.5 kW for rated 10 kW output, proportional at other power levels
- Current Limit21 Amps
- Regulation ModesVolts, Amps, Watts
- Output Control ModesRamping, Run Time, Joule, Sequence, Constant Run
- DC Linearity/Accuracy Independent of Regulation Mode±0.1%: 10 - 100% of rated output
- DC Linearity/Accuracy in Watts Mode±0.25%: 1 - 10% of rated output
- Line Regulation±0.1% for ±10% line voltage change ±2% line frequency change
- Load Regulation±0.1% for a 4:1 load impedance range
- Line Voltage and Current200 - 208V (-7.5%+10%)/35A/45A, 400V (±10%)/19A/25A, 480V (±10%)/16A/21A, AC Input (3-phase)/Nom/Max
- Line Frequency50 and 60 Hz, ±2%
- Line-to-Output Efficiency>85%
- Input Power Factor>0.7 at maximum power output
- Fully Functional Front PanelProvides complete control and monitoring from the master unit
- Remote Front PanelProvides complete remote control and monitoring functions
- Blank Front PanelThree LEDs indicate AC On, DC On, and Fault
- Cooling SystemForced air, front panel & right side in, rear panel out
- Weight55 lbs (25kg)
- Dimensions5.22 x 18.9 x 24.8 inches (132.5 x 480 x 631 mm) (height x width x depth) including rack mount & handles
- ComplianceNRTL: UL 3111-1 (1994) CAN/CSA C22.2 No. 1010.1-92 EN61010-1:1993/A2:1995, EN50081-2: 1992 EN50082-2: 1995, IEC 68-2-9 test for bump, IEC 68-2-6 test for vibration, IEC 68-2-23 test for bump (certified to meet)
- Operating Temperature5 - 40°C
- Relative Humidity80% RH maximum at up to 31°C (decreasing linearly to 50% RH maximum at 40°C) (operational)
- Maximum Operating Altitude+3500 meters above sea level
- Digital and Analog Interface Connections9-pin Type D with RS232/422 ENI Protocol, 25 pin Analog
- Optional Interface ConnectionsPROFIBUS®, DNET™
- Output ConnectionsUHF female or Terminal Block
- AC Input Connections5 terminal barrier strip
- Interlock Connections2 terminal PC header
- Rack MountingEIA (Standard), Universal JIS Bracket (optional)
Technical Specs
- TypePulsed DC Generator
- Frequency25 - 125 kHz or 50 - 250 kHz
- Duty Cycle0 - 40% (Reverse Bias)
- Power Output10 kW
- Power Limit10.5 kW for rated 10 kW output, proportional at other power levels
- Current Limit21 Amps
- Regulation ModesVolts, Amps, Watts
- Output Control ModesRamping, Run Time, Joule, Sequence, Constant Run
- DC Linearity/Accuracy Independent of Regulation Mode±0.1%: 10 - 100% of rated output
- DC Linearity/Accuracy in Watts Mode±0.25%: 1 - 10% of rated output
- Line Regulation±0.1% for ±10% line voltage change ±2% line frequency change
- Load Regulation±0.1% for a 4:1 load impedance range
- Line Voltage and Current200 - 208V (-7.5%+10%)/35A/45A, 400V (±10%)/19A/25A, 480V (±10%)/16A/21A, AC Input (3-phase)/Nom/Max
- Line Frequency50 and 60 Hz, ±2%
- Line-to-Output Efficiency>85%
- Input Power Factor>0.7 at maximum power output
- Fully Functional Front PanelProvides complete control and monitoring from the master unit
- Remote Front PanelProvides complete remote control and monitoring functions
- Blank Front PanelThree LEDs indicate AC On, DC On, and Fault
- Cooling SystemForced air, front panel & right side in, rear panel out
- Weight55 lbs (25kg)
- Dimensions5.22 x 18.9 x 24.8 inches (132.5 x 480 x 631 mm) (height x width x depth) including rack mount & handles
- ComplianceNRTL: UL 3111-1 (1994) CAN/CSA C22.2 No. 1010.1-92 EN61010-1:1993/A2:1995, EN50081-2: 1992 EN50082-2: 1995, IEC 68-2-9 test for bump, IEC 68-2-6 test for vibration, IEC 68-2-23 test for bump (certified to meet)
- Operating Temperature5 - 40°C
- Relative Humidity80% RH maximum at up to 31°C (decreasing linearly to 50% RH maximum at 40°C) (operational)
- Maximum Operating Altitude+3500 meters above sea level
- Digital and Analog Interface Connections9-pin Type D with RS232/422 ENI Protocol, 25 pin Analog
- Optional Interface ConnectionsPROFIBUS®, DNET™
- Output ConnectionsUHF female or Terminal Block
- AC Input Connections5 terminal barrier strip
- Interlock Connections2 terminal PC header
- Rack MountingEIA (Standard), Universal JIS Bracket (optional)