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10kW Pulsed DC Plasma Generator

Overview

The RPDG-100 is a 10,000W Asymmetric Bipolar Pulsed DC generator that enables deposition of a wide variety of low defect films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN.

10,000 W asymmetric bipolar pulsed DC generator
For Reactive* PVD, CVD Bias and Hard Coating
Programmable frequency and duty cycle

Specifications

Type

RPDG-100 10kW Pulsed DC Plasma Generator
Frequency

Programmable from 25 to 125 kHz or 50 to 250 kHz (Range set by factory)
Duty Cycle

Programmable from 0 to 40% (Reverse Bias)
Power Output

10kW
Power Limit

10.5kW for rated 10kW output; proportional at other power levels
Current Limit

21A
Regulation Modes

Volts, Amps, Watts
Output Control Modes

Ramping, Run Time, Joule, Sequence, Constant Run
DC Linearity/Accuracy Independent of Regulation Mode

±0.1%: 10-100% of rated output
DC Linearity/Accuracy in Watts Mode

±0.25%: 1-10% of rated output
Line Regulation

±0.1% for ±10% line voltage change ±2% line frequency change
Load Regulation

±0.1% for a 4:1 load impedance range
Line Voltage and Current

200 - 208V (-7.5%+10%)/35A/45A
400V (±10%)/19A/25A
480V (±10%)/16A/21A
AC Input (3-phase)/Nom/Max
Line Frequency

50 and 60 Hz, ±2%
Line-to-Output Efficiency

>85%
Input Power Factor

>0.7 at maximum power output

Fully Functional Front Panel

Provides complete control and monitoring from the master unit
Remote Front Panel

Provides complete remote control and monitoring functions
Blank Front Panel

Three LEDs indicate AC On, DC On, and Fault
Cooling System

Forced air; front panel & right side in, rear panel out
Weight

55 lbs (25kg)
Dimensions

5.22 x 18.9 x 24.8 inches (132.5 x 480 x 631 mm) (H x W x D) including rack mount & handles
Compliance

CE, CAN/CSA-C22.2 No. 61010.1, UL 61010-1, IEC 68-2-9 test for bump, IEC 68-2-6 test for vibration, IEC 68-2-23 test for bump
Operating Temperature

5 to 40°C
Relative Humidity

80% RH maximum at up to 31°C (decreasing linearly to 50% RH maximum at 40°C) (operational)
Maximum Operating Altitude

+3500 meters above sea level
Digital and Analog Interface Connections

9-pin Type D with RS232 / 422 ENI Protocol, 25 pin Analog
Optional Interface Connections

PROFIBUS®, DNET™
Output Connections

UHF female or Terminal Block
AC Input Connections

5 terminal barrier strip
Interlock Connections

2 terminal PC header
Rack Mounting

EIA (Standard)
Universal JIS Bracket (optional)