Sorry, this product is no longer offered for sale. For recommended replacements see dissolved-ozone-delivery-systems.
LIQUOZON® HeliO3 12-49 ppm, 60 lpm, Modular Dissolved Ozone Delivery System
Model: LIQUOZON-HELIO3
LIQUOZON® HeliO3 12-49 ppm, 60 lpm, Modular Dissolved Ozone Delivery System
Model: LIQUOZON-HELIO3
Overview
Overview
The LIQUOZON® HeliO3 ozonated water delivery system is comprised of at least two modules: a self-contained stand-alone Gas Module and a Wet Module that integrates in the customer's TOOL. Several combinations including closed loop control and special safety features are available. The LIQUOZON® HeliO3 is designed to operate in either single pass or recirculation mode.
Technical Specs
- TypeOzone Water Delivery System
- Ozone GeneratorAX8407LS - D - 01
- Ozone Concentration12 - 49 ppm
- Flow Rate60 lpm, higher flow rates possible in bypass mode
- Feed GasO2
- Feed Gas QualityGrade 4 (purity >99.99%) or better
- Feed Gas Flow Rate≤8 slm, typ. 4.8 slm, according to SEMI E12 (0°C/1.01325 bar)
- Feed Gas Inlet Pressure4.5 - 7.6 barg (0.45 - 0.76 MPag, 65 - 110 psig)
- Dopant GasCO2
- Dopant Gas Quality≥Grade 4.5 (purity .99.995%) dew point ?40°C
- Dopant Gas Flow Rate≤0.3 slm, typ. 0.2 slm, according to SEMI E12 (0°C/1.01325 bar)
- Dopant Gas Inlet Pressure5.0 - 7.6 barg (0.50 - 0.76 MPag, 73 - 110 psig)
- N2 Dopant Gas Purity Required≥Grade 4.0 (purity ≥99.99%), dew point < - 40°C
- N2 Dopant Gas Pressure Required4.5 - 7.6 barg (0.45 - 0.76 MPag, 65 - 110 psig)
- N2 Dopant Gas Standard Flow Rate Required≤0.8 sccm, typ. 0.5 sccm, according to SEMI E12 (0°C/1.01325 bar)
- Compressed Dry Air Standard Flow Rate Required≤10 slm, typ. 2 slm, according to SEMI E12 (0°C/1.01325 bar)
- Compressed Dry Air Purity RequiredFiltrated (free of oils & particles)
- Compressed Dry Air Pressure Required5.2 - 8.2 barg (0.52 - 0.82 MPag, 75 - 119 psig)
- Cooling Water Flow Recommended3.8 L/min (typical)
- Cooling Water PressureMax. 5.0 barg (0.5 MPag, 73 psig)
- Cooling Water Temperature17 - 23°C, rated 20°C
- Cooling Water Differential Pressure Required≥2.0 bar (0.2 MPa, 29 psi)
- Cooling Water QualityDemineralized, filtrated (≤20µm)
- Cooling Water Resistivity (Conductivity) Required50 - 3000 kΩ*cm (20 - 0.33µS/cm)
- Cooling Water pH Value Required7.0 - 8.0
- Process Liquid Flow Rate RequiredMax. 60 L/min
- Process Liquid Pressure Required0.5 - 2.5 barg (0.05 - 0.25 MPag, 7 - 36 psig)
- Process Liquid Temperature Required15 - 50°C
- Gas Module12 - 14100 - 01300 - 2M00
- Gas Module MaterialCoated steel
- Gas Module Power Supply Current TypeAC
- Gas Module Power Supply Frequency50 - 60 Hz
- Gas Module Power Supply Class of ProtectionIP 40
- Gas Module Power Supply Collective Apparent power2000 VA
- Gas Module Power Supply Phases3/N/PE~
- Gas Module Power Supply RMS Full Load Phase Current3.8 A Maximum
- Gas Module Power Supply Collective True Power1980 W
- Gas Module Power Supply Voltage400 V ±10%
- Liquid Wetted SurfacesPFA, PTFE, FFKM
- Wet Module12 - 21A - 1000A - 0000
- Wet Module MaterialPP
- Wetted Surfaces316L stainless steel, PFA, PTFE
- Wet Module - Process Liquid IN - supplied from TOOLDeionized ozonized water with HF and HCl up to 10 wt% each, free of silicon wafer fragments
- Control InterfacesBinary in/out (dry contacts), RS232, RS485, USB
- DimensionsWet Module: 350 x 200 x 630 mm (width x height x depth), Gas Module: 550 x 950 x 600 mm (width x height x dept)
- WeightWet Module: 15 kg (approximate), Gas Module: 120 kg (approximate)
- ComplianceCE mark, NRTL prepared
Technical Specs
- TypeOzone Water Delivery System
- Ozone GeneratorAX8407LS - D - 01
- Ozone Concentration12 - 49 ppm
- Flow Rate60 lpm, higher flow rates possible in bypass mode
- Feed GasO2
- Feed Gas QualityGrade 4 (purity >99.99%) or better
- Feed Gas Flow Rate≤8 slm, typ. 4.8 slm, according to SEMI E12 (0°C/1.01325 bar)
- Feed Gas Inlet Pressure4.5 - 7.6 barg (0.45 - 0.76 MPag, 65 - 110 psig)
- Dopant GasCO2
- Dopant Gas Quality≥Grade 4.5 (purity .99.995%) dew point ?40°C
- Dopant Gas Flow Rate≤0.3 slm, typ. 0.2 slm, according to SEMI E12 (0°C/1.01325 bar)
- Dopant Gas Inlet Pressure5.0 - 7.6 barg (0.50 - 0.76 MPag, 73 - 110 psig)
- N2 Dopant Gas Purity Required≥Grade 4.0 (purity ≥99.99%), dew point < - 40°C
- N2 Dopant Gas Pressure Required4.5 - 7.6 barg (0.45 - 0.76 MPag, 65 - 110 psig)
- N2 Dopant Gas Standard Flow Rate Required≤0.8 sccm, typ. 0.5 sccm, according to SEMI E12 (0°C/1.01325 bar)
- Compressed Dry Air Standard Flow Rate Required≤10 slm, typ. 2 slm, according to SEMI E12 (0°C/1.01325 bar)
- Compressed Dry Air Purity RequiredFiltrated (free of oils & particles)
- Compressed Dry Air Pressure Required5.2 - 8.2 barg (0.52 - 0.82 MPag, 75 - 119 psig)
- Cooling Water Flow Recommended3.8 L/min (typical)
- Cooling Water PressureMax. 5.0 barg (0.5 MPag, 73 psig)
- Cooling Water Temperature17 - 23°C, rated 20°C
- Cooling Water Differential Pressure Required≥2.0 bar (0.2 MPa, 29 psi)
- Cooling Water QualityDemineralized, filtrated (≤20µm)
- Cooling Water Resistivity (Conductivity) Required50 - 3000 kΩ*cm (20 - 0.33µS/cm)
- Cooling Water pH Value Required7.0 - 8.0
- Process Liquid Flow Rate RequiredMax. 60 L/min
- Process Liquid Pressure Required0.5 - 2.5 barg (0.05 - 0.25 MPag, 7 - 36 psig)
- Process Liquid Temperature Required15 - 50°C
- Gas Module12 - 14100 - 01300 - 2M00
- Gas Module MaterialCoated steel
- Gas Module Power Supply Current TypeAC
- Gas Module Power Supply Frequency50 - 60 Hz
- Gas Module Power Supply Class of ProtectionIP 40
- Gas Module Power Supply Collective Apparent power2000 VA
- Gas Module Power Supply Phases3/N/PE~
- Gas Module Power Supply RMS Full Load Phase Current3.8 A Maximum
- Gas Module Power Supply Collective True Power1980 W
- Gas Module Power Supply Voltage400 V ±10%
- Liquid Wetted SurfacesPFA, PTFE, FFKM
- Wet Module12 - 21A - 1000A - 0000
- Wet Module MaterialPP
- Wetted Surfaces316L stainless steel, PFA, PTFE
- Wet Module - Process Liquid IN - supplied from TOOLDeionized ozonized water with HF and HCl up to 10 wt% each, free of silicon wafer fragments
- Control InterfacesBinary in/out (dry contacts), RS232, RS485, USB
- DimensionsWet Module: 350 x 200 x 630 mm (width x height x depth), Gas Module: 550 x 950 x 600 mm (width x height x dept)
- WeightWet Module: 15 kg (approximate), Gas Module: 120 kg (approximate)
- ComplianceCE mark, NRTL prepared
Resources & Downloads
Drawings & CADs
LIQUOZON® HeliO3 Dimensional Drawings(1.3 MB, PDF)