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The LIQUOZON® HeliO3 is specially designed for solar applications such as cleaning, surface conditioning and oxide growth. The ozonated water delivery system is a powerful source for wet processing with ozone and/or chemical mixtures such as acids with ozone. The system is comprised of at least two modules: a self-contained stand-alone Gas Module and a Wet Module that integrates in the customer’s TOOL. Several combinations including closed loop control and special safety features are available.