ILP Integrated Soft-start Vacuum Isolation Valves
Model: ILP
ILP Integrated Soft-start Vacuum Isolation Valves
Model: ILP

Overview
Overview
The ILP Integrated LoPro™ Valve is a pneumatically actuated isolation valves with a bypass valve integrated internally to the main valve. The main valve is a normally closed bellows sealed valve. The bypass valve is a normally closed O-ring shaft sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure defined by the users control sequence. In the second stage, the main valve opens, allowing use of full pumping speed.
Technical Specs
- TypeSoft-start Valve
- Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
- Body ConfigurationInline
- Port SizeNW50
- Flange Size2.0 in. Tube
- Flange TypeTube
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationPneumatic, Normally Open
- Limit SwitchNo
- SealKalrez
- Control Port Options0.375 in. NPT female
- Cylinder VolumeMain: 1.2 - 6.4 in3 (20 - 105 cm3) depending on port size, Bypass: .16 in3 (2.6 cm3)
- Limit Switch Rating12 - 27 VDC (24 VDC nominal)
- Blow-By PressureMain: 100 - 45 psia, depending on port size, Bypass: >100 psia
- Actuation TimeMain: Opening: 0.12 - 0.45 sec, Closing: 0.18 - 1.13 sec, at 100 psi, depending on port size, Bypass: <0.10 seconds
- Maximum Internal Spring Closing PressureMain: 60 - 45 psia, depending on port size, Bypass: 45 psig
- Suggested Nominal Pressure Supply90 psig, ±30 psig
- WeightAngle: 2.3 - 6.4 lbs (1.0 - 2.9 kg) depending on configuration
Technical Specs
- TypeSoft-start Valve
- Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
- Body ConfigurationInline
- Port SizeNW50
- Flange Size2.0 in. Tube
- Flange TypeTube
- Helium Leak Rate1.0 x 10-9 std cc/sec
- ActuationPneumatic, Normally Open
- Limit SwitchNo
- SealKalrez
- Control Port Options0.375 in. NPT female
- Cylinder VolumeMain: 1.2 - 6.4 in3 (20 - 105 cm3) depending on port size, Bypass: .16 in3 (2.6 cm3)
- Limit Switch Rating12 - 27 VDC (24 VDC nominal)
- Blow-By PressureMain: 100 - 45 psia, depending on port size, Bypass: >100 psia
- Actuation TimeMain: Opening: 0.12 - 0.45 sec, Closing: 0.18 - 1.13 sec, at 100 psi, depending on port size, Bypass: <0.10 seconds
- Maximum Internal Spring Closing PressureMain: 60 - 45 psia, depending on port size, Bypass: 45 psig
- Suggested Nominal Pressure Supply90 psig, ±30 psig
- WeightAngle: 2.3 - 6.4 lbs (1.0 - 2.9 kg) depending on configuration
