DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®
Overview
The DA06A Baratron® Capacitance Manometer provides three decades of pressure output with enhanced accuracy and calibration points from 1 Torr to 1 mTorr for advanced processes like etch and deposition. Designed with a wide and high accuracy pressure range, a single DA06A can be used in place of multiple manometers, thereby simplifying system integration, reducing overall system mechanical and electrical hardware and cabling, and freeing up valuable process chamber space.
- 3 decade measurement reduces the need for multiple manometers
- Meets current SEMI® EtherCAT® Device Profiles for vacuum gauges
- Temperature-controlled at 45°C, 80°C or 100°C
- Standard MKS sensor or fluorine/deposition-friendly sensor option
Products
Configuration Options
The following options are available for DA06A Baratron® Heated Capacitance Manometers
Ordering Code Example: DA06A01TCEL31BAA0H00
| Configuration Option | Option Code |
|---|---|
| DA06A Absolute Manometer | DA06A |
Ranges |
|
| 1 Torr | 01 |
Units of Measurement(corresponds to digital output units) |
|
| Torr | T |
| mbar | M |
Fittings |
|
| 1/2 in. OD tube | BA |
| 8 VCR female | CE |
| 8 VCR male | CF |
| NW16 ISO-KF | GA |
| NW25 ISO-KF | GC |
| Mini-CF | HA |
Sensor Type |
|
| Standard | S |
| Fluorine/Deposition Friendly | L |
Input/Output Voltages |
|
| ±15 VDC | 2 |
| ±24 VDC | 3 |
Sensor Temperature |
|
| 45°C | 4 |
| 80°C | 8 |
| 100°C | 1 |
Electrical Connector1 |
|
| 15-pin D with Screw Locks | B |
| 15-pin D with Slide Lock Posts | P |
Integral Relays2 |
|
| No Relays | 00 |
| Trip Point A Above Set Point, Trip Point B Above Set Point | AA |
| Trip Point A Above Set Point, Trip Point B Below Set Point | AB |
| Trip Point A Below Set Point, Trip Point B Below Set Point | BB |
| Trip Point A Below Set Point, Trip Point B Above Set Point | BA |
Reserved |
|
| Reserved for Future Use | 0 |
Calibration Orientation |
|
| Horizontal | H |
| Vertical | V |
Accuracy |
|
| Standard | 0 |
Other Options |
|
| None | 0 |
1 For CE compliance, the mating electrical connector must be properly grounded.
2 Units with trip points have default set points of 50% of Full Scale, a default hysteresis of 5%, and actuation direction based on the part number code. The settings are user adjustable through EtherCAT.
* Custom part numbers can be requested for copy exact applications.
** Standard part numbers will ship with the latest firmware at the date of manufacture. A custom part number should be requested for locked firmware/EtherCAT ESI file.
Specifications
-
TypeTemperature-Controlled Capacitance Manometer
-
Accuracy1000 mT to 10mT: ±0.4% of Reading
8 mT: ±0.5% of Reading
5 mT: ±0.7% of Reading
3 mT: ±0.8% of Reading
2 mT: ±1.0% of Reading
1 mT3: ±1.5% of Reading -
Response TimePressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT: Refresh Rate 1 ms -
Fitting Type0.50 in. OD tube, 8 VCR Female, 8 VCR Male, NW16-KF, NW25-KF, Mini-CF (1.33 in.)
Contact MKS if alternative fitting is required. -
Output SignalEtherCAT®
-
Electrical ConnectorPower: 15-pin D-subminiature male
EtherCAT: Two RJ45 female receptacles for incoming and network signals -
Zero Temperature Coefficient0.002% Full Scale/°C
-
Span Temperature Coefficient0.02% Reading/°C
-
Ambient Operating Temperature15° to 60°C (15-40 for 45°C manometer)
-
Volume6.3 cm3 typical.
Contact MKS for volumes with specific flanges. -
Warm-up Time4 hours
-
Overpressure Limit45 psia (310 kPA)
-
Materials Exposed to Process GasesInconel® and Incoloy® nickel alloys (Fittings 300 Series Stainless Steel)
-
Power Requirements+24 VDC ±10% @ 700 mA max
±15 VDC ±5% @ 700 mA max -
IndicatorsGreen RUN LED and Red ERR LED for EtherCAT and Manometer status
Green Link/Activity Indicator on bottom right of RJ45 connectors
Rotary hex switches supporting configured station alias and explicit device identification -
ComplianceCE, UKCA
Ultra-High Velocity