DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®
Model: DA06A
DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®
Model: DA06A

Overview
Overview
The DA06A Baratron® Capacitance Manometer provides three decades of pressure output with enhanced accuracy and calibration points from 1 Torr to 1 mTorr for advanced processes like etch and deposition. Designed with a wide and high accuracy pressure range, a single DA06A can be used in place of multiple manometers, thereby simplifying system integration, reducing overall system mechanical and electrical hardware and cabling, and freeing up valuable process chamber space.
Technical Specs
- Sensor TypeFluorine/Deposition Friendly
- Sensor Temperature100°C
- Full Scale Range1 Torr
- Fitting Type8 VCR female
- Electrical Connector15-pin D with Slide Lock Posts
- Power Requirements+24 VDC
- Trip PointsTrip Point A Below Set Point, Trip Point B Above Set Point
- Unitsmbar
Technical Specs
- Sensor TypeFluorine/Deposition Friendly
- Sensor Temperature100°C
- Full Scale Range1 Torr
- Fitting Type8 VCR female
- Electrical Connector15-pin D with Slide Lock Posts
- Power Requirements+24 VDC
- Trip PointsTrip Point A Below Set Point, Trip Point B Above Set Point
- Unitsmbar
