Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone
Model:
AX8555
Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone
Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone
Model:
AX8555
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AX8555 Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone
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Overview
The AX8555 Stand-Alone Low Flow Ozone Delivery System supports multiple chambers or tools to provide ultra clean ozone gas. The AX8555 is a fully integrated, lower flow ozone gas delivery system specifically designed for advanced semiconductor process applications such as Atomic Layer Deposition (ALD).
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
26 - 180 g/hr per channel
Flow Rate
0.5 - 5 slm per channel
Feed Gas
Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
Feed Gas Supply Pressure
60 psig (4.2 kg/cm2 ) nominal, 75 psig (5.3 kg/cm2 ) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
Feed Gas Purity
99.9995% minimum
Operating Temperature
41 - 104°F (5 - 40°C)
Cooling Water Temperature Required
63 - 73°F (17 - 23°C)
Cooling Water Filtration Required
20µm
Cooling Water Quality Required
Demineralized
Cooling Water Minimum Flow Required
1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
Cooling Water Connections Required
1/2 in. compression (Swagelok®)
Cooling Water Flow Control/Indication Required
Variable - area flow meter with valve
Cooling Water Pressure Indication Required
Inlet pressure gauge
Voltage Requirements
208 volts AC (±10%), three phase
Current Requirements
15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
Frequency
50/60 Hz
Pressure Indication
Inlet pressure gauge for each gas
Exhaust Flow Rate
150 cfm (70.8 l/s)
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure
70 - 100 psig
Control Air Type
CDA or dry nitrogen, 40µm filtered
Control Air Fitting
1/4 in. compression (Swagelok®)
Exhaust Connection
6 - in. diameter duct opening
Dimensions
24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
Compliance
CE, S2 - 0302, F47
Altitude
Up to 3280 ft. (1000 m) above mean sea level
Technical Specs
Type
Ozone Gas Delivery System
Ozone Output
26 - 180 g/hr per channel
Flow Rate
0.5 - 5 slm per channel
Feed Gas
Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
Feed Gas Supply Pressure
60 psig (4.2 kg/cm2 ) nominal, 75 psig (5.3 kg/cm2 ) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
Feed Gas Purity
99.9995% minimum
Operating Temperature
41 - 104°F (5 - 40°C)
Cooling Water Temperature Required
63 - 73°F (17 - 23°C)
Cooling Water Filtration Required
20µm
Cooling Water Quality Required
Demineralized
Cooling Water Minimum Flow Required
1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
Cooling Water Connections Required
1/2 in. compression (Swagelok®)
Cooling Water Flow Control/Indication Required
Variable - area flow meter with valve
Cooling Water Pressure Indication Required
Inlet pressure gauge
Voltage Requirements
208 volts AC (±10%), three phase
Current Requirements
15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
Frequency
50/60 Hz
Pressure Indication
Inlet pressure gauge for each gas
Exhaust Flow Rate
150 cfm (70.8 l/s)
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure
70 - 100 psig
Control Air Type
CDA or dry nitrogen, 40µm filtered
Control Air Fitting
1/4 in. compression (Swagelok®)
Exhaust Connection
6 - in. diameter duct opening
Dimensions
24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
Compliance
CE, S2 - 0302, F47
Altitude
Up to 3280 ft. (1000 m) above mean sea level
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Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone