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AX8555 Stand-Alone Low Flow Ozone Delivery System
Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone


  • Type
    Ozone Gas Delivery System
  • Ozone Output
    26 - 180 g/hr per channel
  • Flow Rate
    0.5 - 5 slm per channel
  • Feed Gas
    Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
  • Feed Gas Supply Pressure
    60 psig (4.2 kg/cm2) nominal, 75 psig (5.3 kg/cm2) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    41 - 104°F (5 - 40°C)
  • Cooling Water Temperature Required
    63 - 73°F (17 - 23°C)
  • Cooling Water Filtration Required
  • Cooling Water Quality Required
  • Cooling Water Minimum Flow Required
    1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
  • Cooling Water Connections Required
    1/2 in. compression (Swagelok®)
  • Cooling Water Flow Control/Indication Required
    Variable - area flow meter with valve
  • Cooling Water Pressure Indication Required
    Inlet pressure gauge
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
  • Frequency
    50/60 Hz
  • Pressure Indication
    Inlet pressure gauge for each gas
  • Exhaust Flow Rate
    150 cfm (70.8 l/s)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
  • Control Air Pressure
    70 - 100 psig
  • Control Air Type
    CDA or dry nitrogen, 40µm filtered
  • Control Air Fitting
    1/4 in. compression (Swagelok®)
  • Exhaust Connection
    6 - in. diameter duct opening
  • Dimensions
    24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
  • Compliance
    CE, S2 - 0302, F47
  • Altitude
    Up to 3280 ft. (1000 m) above mean sea level


Environmentally Friendly Solution

For gate oxides and high-k dielectric materials, one of the precursors needs to be an oxidizer. Ozone has many advantages over other oxidizers as a precursor for ALD and as a strong oxidizing agent. Ozone has a high redox potential, can be generated at the point-of-use, and it decays naturally into oxygen (2O3 ⇒ 3O2). Therefore, it is considered a "green" chemical. If required, ozone can also be destroyed at the output of the process chamber using a catalytic or thermal destruct unit. This significantly lowers chemical disposal cost, as the output is oxygen and contains no ozone. Ozone is very stable at room temperature, making it a good choice for most applications. In addition to ALD, typical ozone applications include chemical vapor deposition (CVD), photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

Multi-channel Capability

The AX8555 system is configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. The ozone source for each channel is the production-proven AX8560 ozone delivery subsystem. It incorporates MKS patented, field-proven, high concentration, ultra clean ozone generation technology, as well as integrated ozone concentration monitor and flow control. The AX8555 includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor, status indicator panel, and optional integrated ozone destructs for each channel.

AX8560 Performance Graph

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