The AX8550 SEMOZON® 2-Channel, Standalone Ozone Delivery System provides maximum uptime and minimum complexity with its modular design. All modules are housed in a vented 19-inch rack. These advanced Ozone delivery systems may be configured with one or two SEMOZON® AX8400 series ozone generators with a choice of common or independent, dual-channel gas flow control. SEMOZON® AX8550 is uniquely suited for ozone applications in semiconductor fabrication, including TEOS/Ozone CVD, Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.