Specifications

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    375 g/hr per channel
  • Flow Rate
    30 slm per channel
  • Feed Gas
    Oxygen: Grade 6 or better with less than 1 ppm water, hydrocarbons, and halocarbons, dew point .40°F, Nitrogen: Grade 5 or better
  • Operating Temperature
    10 - 40°C (50 - 104°F)
  • Control Interface
    PLC with digital and analog input/output modules
  • Cooling Water Temperature Required
    17° - 23°C (63° - 73°F)
  • Cooling Water Minimum Flow Required
    9.5 lpm (2.5 gpm) Recommended flow/channel
  • Voltage Requirements
    200 - 230 VAC, 3Ø
  • Current Requirements
    50A max
  • Frequency
    50/60 Hz
  • Nominal O2 Inlet Pressure
    4.1 bargauge (60 psig)
  • Nominal N2 inlet pressure
    4.8 bargauge (70 psig)
  • Maximum Number of O2 Generators
    2
  • Number Independent Channels
    2
  • Flow Control
    Upstream
  • Gas Flow Control/Indication
    O2 and N2 Rotameters (MFCs optional)
  • Ozone Pressure Control
    Manual
  • Nominal delivery pressure
    1.4 - 3.1. bargauge (20 - 45 psig)
  • Gas Mixing
    Internal
  • Ozone Concentration Control
    Open Loop or Closed Loop
  • Ozone Concentration Monitor
    Standard (gas phase)
  • Dimensions
    916 x 611 x 1559 mm (36 x 24 x 61.4 in) (length x width x height)
  • Weight
    340 kg (750 lbs) (approximate)
  • Compliance
    SEMI S2 - 0302, CE Mark, NRTL tested to UL and CSA standards (AX8550 Systems)

Resources

Application Notes

Drawings & CADs

Literature

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