The 974B-22034 QuadMag Cold Cathode / MicroPirani / Piezo Transducer offers a measurement range from 1x10-8 to 1500 Torr and features a size NW25 ISO-KF flange fitting. It has an RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. The 974B QuadMag has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974B can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Cold Cathode,MicroPirani™ (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm)
Display
Touch-screen
Seal Material
Viton
Enclosure
Standard
Electrical Connector
15-pin, High Density, D-sub male
Interface
RS485/analog
Relays
3
Fitting Type
NW25 ISO-KF
Installation Orientation
Any
Set Point Range
Absolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr
Calibration Gas
Nitrogen
Operating Temperature
0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature
85°C (185°F)
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per Decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9 - 30 VDC, 2 Watts
Accuracy
Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 Torr ±5% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -10 to +10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, +10 to 100 Torr ±5% of Reading
Repeatability
Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 ±2% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -760 to +10 Torr ±1% of Reading
Overpressure Limit
1500 Torr
Internal Volume
21 cm3
Electronic Casing and Flange
304 stainless steel
Compliance
CE
Zero Stability
±0.1% of Full Scale (Full Scale = 760 Torr) (typical) Differential
Technical Specs
Absolute Measurement Range
1.0 x 10-8 to 1500 Torr
Differential Measurement Range
-760 to +760 Torr
Digital Communication
RS485
Type
Vacuum Transducer
Sensor
Cold Cathode,MicroPirani™ (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm)
Display
Touch-screen
Seal Material
Viton
Enclosure
Standard
Electrical Connector
15-pin, High Density, D-sub male
Interface
RS485/analog
Relays
3
Fitting Type
NW25 ISO-KF
Installation Orientation
Any
Set Point Range
Absolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr
Calibration Gas
Nitrogen
Operating Temperature
0 - 40°C (32 - 104°F)
Maximum Bakeout Temperature
85°C (185°F)
Digital Controls
Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
Digital Status
Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
Analog Output
0.5 VDC per Decade
Relay Contact Rating
1 A @ 30VAC/DC, resistive
Power Requirements
9 - 30 VDC, 2 Watts
Accuracy
Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 Torr ±5% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -10 to +10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, +10 to 100 Torr ±5% of Reading
Repeatability
Absolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 ±2% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -760 to +10 Torr ±1% of Reading
Overpressure Limit
1500 Torr
Internal Volume
21 cm3
Electronic Casing and Flange
304 stainless steel
Compliance
CE
Zero Stability
±0.1% of Full Scale (Full Scale = 760 Torr) (typical) Differential
Additional CAD file downloads are not available for this product.
974B-22034 - Drawings
Additional drawings are not available for this product.
974B-22034
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