The EtherCAT® 901P-17020 Micro Pirani-Piezo Loadlock Vacuum Transducer combines Piezo and MicroPirani™ sensor technologies for significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. It features a 1.0x10-5 to 1,000 Torr pressure measurement range with atmospheric switching, and a size NW16 ISO-KF flange and Viton seal. The 901P has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-5 Torr and atmospheric switching capabilities. Compared to gauges used in traditional loadlock designs, the 901P accurate atmospheric pressure measurement can improve loadlock performance by faster cycle times and prevent contamination of loadlock with atmospheric air. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality with patented, gas independent absolute pressure measurement from 50-1000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume.
Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
Digital Status
Absolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
Analog Output
1-9 VDC (1 VDC per Decade)
Analog Output Resolution
16 bit
Power Requirements
9 - 30 VDC, <1.2 Watts maximum
MicroPirani Accuracy
5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading
MicroPirani Repeatability
1 x 10-3 to 100 Torr ±2% of reading
Piezo Differential Accuracy
-10 to 10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, 10 to 100 Torr ±5% of Reading
Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
Digital Status
Absolute and differential pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
Analog Output
1-9 VDC (1 VDC per Decade)
Analog Output Resolution
16 bit
Power Requirements
9 - 30 VDC, <1.2 Watts maximum
MicroPirani Accuracy
5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 100 Torr ±5% of Reading, 100 Torr to Atmosphere ±25% of Reading
MicroPirani Repeatability
1 x 10-3 to 100 Torr ±2% of reading
Piezo Differential Accuracy
-10 to 10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, 10 to 100 Torr ±5% of Reading
Additional CAD file downloads are not available for this product.
901P-17020 - Drawings
Additional drawings are not available for this product.
901P-17020
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