842-066 KLA Filament Kit is a comprehensive maintenance package providing all necessary components for replacing the filament assembly and ensuring a reliable ultra-high vacuum (UHV) seal in process tools utilizing MKS Residual Gas Analyzers (RGA).

This kit includes the 842-023 Open Ion Source Tungsten Filament Assembly, a CF70 Copper Gasket, a Trim Tool to assist with precise installation and/or adjustments, and six M6 x 35 Bolts, Washers, and Nuts.

This kit is tailored for MKS Microvision 2 and/or e-Vision Residual Gas Analyzers (RGA), such as the Microvision and e-Vision 2, and the user serviceable analyzer design allows the ion source to be easily removed and dismantled for cleaning. The dual independent filaments on the MKS analyzers can be easily changed by removing the two barrel connectors and loosening the two holding screws.

To verify compatibility with specific RGA models, consult the “specifications” section below.