842-060 is a precision-engineered tungsten filament assembly designed for use in Closed Ion Sources (CIS) within the MKS 5xx series of mass spectrometry analyzers. This field-replaceable component provides the necessary thermionic emission to ionize gas samples, specifically in environments where corrosive or reactive gases are present.
The dual independent filaments on the MKS analyzers can be easily changed by removing the two barrel connectors and loosening the two holding screws. The mirror image filament plates can then be removed and replaced with a new set.
Tungsten filaments are ideal for industrial process monitoring and PVD/CVD applications where the ion source is exposed to high-pressure gas loads or complex chemical environments.
To verify compatibility with specific RGA models, consult the “specifications” section below.
Additional CAD file downloads are not available for this product.
842-060 - Drawings
Additional drawings are not available for this product.
842-060
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Closed Ion Source, Tungsten Filament, 2 Filaments on One Plate, for 5xx Analysers