Technical Specs

  • Type
    Closed Ion Source
  • Filaments
    Tungsten
  • Compatible with
    RGA Serial Numbers Starting With:
    LM2-, LM22-, LM505-, LM501-, LM500-, MKS2, MKS4, MKS5, MKS6, MKS7, MKSC, MKSE, MKSF, MKSG

Technical Specs

  • Type
    Closed Ion Source
  • Filaments
    Tungsten
  • Compatible with
    RGA Serial Numbers Starting With:
    LM2-, LM22-, LM505-, LM501-, LM500-, MKS2, MKS4, MKS5, MKS6, MKS7, MKSC, MKSE, MKSF, MKSG

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