842-042 is a high-quality replacement assembly equipped with tungsten filaments, specifically designed for use in MKS Microvision 2 and/or e-Vision Residual Gas Analyzers (RGA). This assembly is the primary component where neutral gas molecules are converted into ions via electron impact for subsequent mass filtering. The user serviceable analyzer design allows the ion source to be easily removed and dismantled for cleaning. The ion sources can be removed as one unit for cleaning or replacement in a matter of minutes. MKS ion sources are designed for field serviceability, requiring no special jigs or tools for typical maintenance. This modularity allows for a rapid exchange of a contaminated source with a clean spare. Filaments can be replaced with pre-aligned modules that do not require special tools or jigs, and a spare source can be exchanged with a contaminated one in approximately 15 minutes.

To verify compatibility with specific RGA models, consult the “specifications” section below.