Sorry, this product is no longer offered for sale.
651C Digital/Analog Pressure Controller
Model: 651CD2S2N
651C Digital/Analog Pressure Controller
Model: 651CD2S2N

Overview
Overview
The 651CD2S2N Digital/Analog Pressure Controller features a 1.5 amp power supply and drives MKS 653 or 253 Exhaust Throttle Valves with speed and precision. Its self-tuning algorithm brings the system to set point faster than conventional controllers, and ensures repeatable process recipes without operator involvement. The self-tuning function determines optimal control parameters for any set point in the range of the valve by learning time constants, transfer functions of the valve and plumbing, valve gain, and other important parameters. The 651 includes adjustable soft-start functions for each set point, as well as open and close functions to minimize turbulence in the chamber; local/remote transducer zeroing capability; and two relays to activate other system functions, or to indicate if the pressure deviates from the desired set point. All controls are easily accessed via a simple-to-use front panel, or remotely through RS-232, TTL, or analog voltage. An LCD readout shows valve position and displays pressure in a wide range of engineering units. Five preprogrammable set points are provided for pressure or position control.
Technical Specs
- TypePressure Valve Controller
- For Use With653, 253 Valves
- Valve DriverStepper Motor
- Power Input90 - 132 or 180 - 264 VAC, 50/60 Hz
- Power Output±15 VDC ±5% @ 1.5 Amps max.
- Signal Input0 - 5 or 0 - 10 VDC for 0 - 100% valve position and 0 - 10 VDC for 0 - 100% Full Scale pressure
- Output Signal0 - 5 or 0 - 10 VDC for 0 - 100% valve position and 0 - 10 VDC for 0 - 100% Full Scale pressure
- Set Points5
- External Analog Set Pointsone, pressure or position, 0 - 5 or 0 - 10 VDC
- Relay Output2, process limits: 24 Volts AC/DC @ 1 Amp resistive
- Repeatability±0.1% of Full Scale
- Operating Temperature15 - 40°C (60 - 104°F)
- Display2-line LCD with 4.5 Place Readout
- Display UnitsTorr, mTorr, mbar, Pascal, cmH O, inH O, µbar, kPa
- ConnectorRS232
- User InterfaceFront panel, Analog, TTL (16 inputs, 6 outputs) and RS-232
- ConnectorsValve: 9-pin type D female, I/O: 37-pin type D female, Transducer: 15-pin type D female, RS232: 9-pin type D male
- DimensionsHalf-rack packaging: 3.5 x 9.5 x 9 in. (height x width x depth)
Technical Specs
- TypePressure Valve Controller
- For Use With653, 253 Valves
- Valve DriverStepper Motor
- Power Input90 - 132 or 180 - 264 VAC, 50/60 Hz
- Power Output±15 VDC ±5% @ 1.5 Amps max.
- Signal Input0 - 5 or 0 - 10 VDC for 0 - 100% valve position and 0 - 10 VDC for 0 - 100% Full Scale pressure
- Output Signal0 - 5 or 0 - 10 VDC for 0 - 100% valve position and 0 - 10 VDC for 0 - 100% Full Scale pressure
- Set Points5
- External Analog Set Pointsone, pressure or position, 0 - 5 or 0 - 10 VDC
- Relay Output2, process limits: 24 Volts AC/DC @ 1 Amp resistive
- Repeatability±0.1% of Full Scale
- Operating Temperature15 - 40°C (60 - 104°F)
- Display2-line LCD with 4.5 Place Readout
- Display UnitsTorr, mTorr, mbar, Pascal, cmH O, inH O, µbar, kPa
- ConnectorRS232
- User InterfaceFront panel, Analog, TTL (16 inputs, 6 outputs) and RS-232
- ConnectorsValve: 9-pin type D female, I/O: 37-pin type D female, Transducer: 15-pin type D female, RS232: 9-pin type D male
- DimensionsHalf-rack packaging: 3.5 x 9.5 x 9 in. (height x width x depth)
Resources & Downloads
Literature
Downstream Pressure Controllers and Valves from MKS (476.3 kB, PDF)

