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1640A Metal-sealed Pressure-based 2-20 sccm Mass Flow Controller
Model: 1640A
1640A Metal-sealed Pressure-based 2-20 sccm Mass Flow Controller
Model: 1640A
Overview
Overview
The 1640 Pressure-based Mass Flow Controller is a metal-sealed instrument with standard 3-inch footprint, designed to meter and control gas flows in low-line pressure applications where thermal mass flow controllers are limited in their ability to accurately measure flow. The 1640 utilizes the principle of sonic flow through an orifice, a condition met when the upstream control pressure is at least twice the downstream pressure. Under these conditions, mass flow is proportional to the control pressure. In the 1640A Pressure-Based Mass-Flo Controller, a Baratron® capacitance manometer monitors the pressure upstream of the critical orifice. This pressure is proportional to flow. The measured pressure is compared in the control electronics to the flow set point. A control signal is then generated to drive the proportional control valve to the conductance as required to bring the actual control pressure (flow) into agreement with the flow set point. Typical applications include ion implant Safe Delivery Source® (SDS®) dopant and SACVD ozone flow control, water vapor and gases sensitive to upstream pressure changes.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent) - Maximum Inlet Pressure5 psig
- Control Range5-100% of Full Scale (typical)
- Typical AccuracyGas/flow rate dependent (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.02% of Full Scale/°C
- Span Temperature Coefficient<0.2% of Reading/°C
- Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time<5 sec to 100% of Full Scale (per SEMI Guideline E17-91)
- Operating Temperature0-50°C
- Set Point Command Signal0-5 VDC from <20 kOhm
- Flow Input Output Signal0-5 VDC into >10 kOhm
- Wetted Materials316L stainless steel, nickel, Inconel®, Kel - F®, Chemraz® or Kalrez® (gas/application dependent)
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve1% of Full Scale (Nitrogen) at 15 psig inlet to atmosphere. To assure no flow-through, a separate positive shut-off valve is required.
- Fitting TypeCompatible With Swagelok® 4 VCR®
- Proof Pressure45 psia
- Normal Operating Pressure Differentialbelow 10 Torr
- Analog I/O Connector15-pin type "D"
- Maximum Current Required at Start-up±15 VDC (±5%) @ 200 mA
- Typical Current Required at Steady State±15 VDC (±5%) @ 100 mA
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent) - Maximum Inlet Pressure5 psig
- Control Range5-100% of Full Scale (typical)
- Typical AccuracyGas/flow rate dependent (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.02% of Full Scale/°C
- Span Temperature Coefficient<0.2% of Reading/°C
- Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time<5 sec to 100% of Full Scale (per SEMI Guideline E17-91)
- Operating Temperature0-50°C
- Set Point Command Signal0-5 VDC from <20 kOhm
- Flow Input Output Signal0-5 VDC into >10 kOhm
- Wetted Materials316L stainless steel, nickel, Inconel®, Kel - F®, Chemraz® or Kalrez® (gas/application dependent)
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve1% of Full Scale (Nitrogen) at 15 psig inlet to atmosphere. To assure no flow-through, a separate positive shut-off valve is required.
- Fitting TypeCompatible With Swagelok® 4 VCR®
- Proof Pressure45 psia
- Normal Operating Pressure Differentialbelow 10 Torr
- Analog I/O Connector15-pin type "D"
- Maximum Current Required at Start-up±15 VDC (±5%) @ 200 mA
- Typical Current Required at Steady State±15 VDC (±5%) @ 100 mA