Sorry, this family of products is no longer available. For recommended replacements see mass-flow-controllers.

Metal-sealed Pressure-based 2 to 20 sccm Mass Flow Controller

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1640a metal-sealed pressure-based 2-50 sccm mass flow controller

Overview

The 1640 Pressure-based Mass Flow Controller is a metal-sealed instrument with standard 3-inch footprint, designed to meter and control gas flows in low-line pressure applications, such as Ion Implant, where thermal mass flow controllers are limited in their ability to accurately measure flow. The 1640 utilizes the principle of sonic flow through an orifice, a condition met when the upstream control pressure is at least twice the downstream pressure. Under these conditions, mass flow is proportional to the control pressure.

Specifications

Type

Pressure-based Mass Flow Controller
Full Scale Flow Range

2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent)
Maximum Inlet Pressure

5 psig
Control Range

5% to 100% of Full Scale
Typical Accuracy

Gas/flow rate dependent
Repeatability

± 0.2% of Full Scale
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.02% of Full Scale/°C
Span Temperature Coefficient

<0.2% of Rdg./°C
Warm-up Time

30 minutes
Typical Settling Time

<5 sec

Operating Temperature

0° to 50°C
Power Requirements

± 15 VDC (± 5%) @ 200 mA
Set Point Command Signal

0 to 5 VDC from <20K Ω
Flow Input Output Signal

0 to 5 VDC into >10K Ω
Wetted Materials

316L S.S., nickel, Inconel®
Valve Seat Material

Kel-F®, Chemraz® or Kalrez®
External Leak Integrity

<1 x 10^-9
Leak Integrity Through Closed Valve

1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
Fitting Type

Swagelok® 4 VCR®
Compliance

CE

Specifications

Type

Pressure-based Mass Flow Controller
Full Scale Flow Range

2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent)
Maximum Inlet Pressure

5 psig
Control Range

5% to 100% of Full Scale
Typical Accuracy

Gas/flow rate dependent
Repeatability

± 0.2% of Full Scale
Resolution

0.1% of Full Scale
Zero Temperature Coefficient

<0.02% of Full Scale/°C
Span Temperature Coefficient

<0.2% of Rdg./°C
Warm-up Time

30 minutes
Typical Settling Time

<5 sec

Operating Temperature

0° to 50°C
Power Requirements

± 15 VDC (± 5%) @ 200 mA
Set Point Command Signal

0 to 5 VDC from <20K Ω
Flow Input Output Signal

0 to 5 VDC into >10K Ω
Wetted Materials

316L S.S., nickel, Inconel®
Valve Seat Material

Kel-F®, Chemraz® or Kalrez®
External Leak Integrity

<1 x 10^-9
Leak Integrity Through Closed Valve

1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
Fitting Type

Swagelok® 4 VCR®
Compliance

CE

Accessories

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		CB147-1-10 Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL		Contact Us	$86
		CB259-5-10 Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL		Contact Us	$83