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Metal-sealed Pressure-based 2 to 20 sccm Mass Flow Controller
Metal-sealed Pressure-based 2 to 20 sccm Mass Flow Controller
The 1640 Pressure-based Mass Flow Controller is a metal-sealed instrument with standard 3-inch footprint, designed to meter and control gas flows in low-line pressure applications, such as Ion Implant, where thermal mass flow controllers are limited in their ability to accurately measure flow. The 1640 utilizes the principle of sonic flow through an orifice, a condition met when the upstream control pressure is at least twice the downstream pressure. Under these conditions, mass flow is proportional to the control pressure.
Specifications
- TypePressure-based Mass Flow Controller
- Full Scale Flow Range2-20 sccm (SDS materials)
10-1000 sccm (other materials)
(N2 equivalent) - Maximum Inlet Pressure5 psig
- Control Range5% to 100% of Full Scale
- Typical AccuracyGas/flow rate dependent
- Repeatability± 0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.02% of Full Scale/°C
- Span Temperature Coefficient<0.2% of Rdg./°C
- Warm-up Time30 minutes
- Typical Settling Time<5 sec
- Operating Temperature0° to 50°C
- Power Requirements± 15 VDC (± 5%) @ 200 mA
- Set Point Command Signal0 to 5 VDC from <20K Ω
- Flow Input Output Signal0 to 5 VDC into >10K Ω
- Wetted Materials316L S.S., nickel, Inconel®
- Valve Seat MaterialKel-F®, Chemraz® or Kalrez®
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve1% of Full Scale (nitrogen) at 15 psig inlet to atmosphere
- Fitting TypeSwagelok® 4 VCR®
- ComplianceCE
Accessories
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft. | In Stock | ||||
| CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft. | In Stock |
Resources
Literature
Manuals
1640A Mass Flow Controller Operation Manual(221 kB, PDF) 1640 Pressure-based Mass Flow Controller Pin-outs(23 kB, PDF)
Drawings & CADs
1640 Mass Flow Controller 3D Model Files 1640A Pressure-based Mass Flow Controller Dimensional Drawing(44.3 kB, PDF)