Upstream Flow Control Valve, 100 sccm, 4 VCR Male Fitting, Kalrez Seal

Technical Specs

  • Full Scale Flow Range
    100 sccm
  • Minimum Controllable Flow
    0.1% of Full Scale
  • Closed Conductance Leakage
    <1 × 10-5 scc/sec He
  • Exposed Materials
    316 stainless steel, Nickel, Kalrez
  • Seal Material
    Kalrez
  • Fitting Type
    4 VCR, male
  • Operating Temperature
    -10 - 60°C

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