Configuration Options

t3b high-speed exhaust throttle valve with integrated controller T3BI Exhaust Throttle Valve, High-speed, Butterfly, Series T3B


  • Type
    T3B High Speed Exhaust Throttle Valves
  • Accuracy
    0.25% of set point, or 5mV (whichever is greater)
  • Control Range
    0.0001%-100% Full Scale (with Dual Transducer Input)
  • Operating Temperature
    Motor and Electronics: 0 to 40°C
    Valve Body: 0 to 105°C, 150°C (optional)
  • Storage Temperature
    -20 to 80°C
  • Seal Material
    Kalrez®, Chemraz®
    Others upon request
  • Power Requirements
    DeviceNet: 11-25 VDC
    Valve Power: 24 VDC @ <100 W maximum
  • Valve Speed
    High speed, direct drive non-sealing: <0.2 seconds (available in 4 inch and smaller sizes only)
    Standard speed, geared drives or F-seal versions: <0.5 - 1.0 seconds (size dependent)
  • Input-Output Signals
    Analog I/O: Pressure input (dual channel)- Nominally ±10 VDC, ±5 VDC and ±1 VDC are selectable
    Discrete I/O: Alarm trip point outputs - (2) relays @ 2.0A @ 30 VDC with status LEDs
  • Connectors
    15-pin female Type "D" each channel (Analog)
  • Switches
    Valve Open & Valve Close
  • Compliance


Flapper Positioning or Pressure Control

T3B Throttle Valves can operate in two modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. The T3B also includes adjustable soft-start functions for set point changes to minimize turbulence and thus particle distribution in the chamber. Two alarm relay outputs are available. The T3B is compatible with all MKS Baratron capacitance manometers to allow for precise closed-loop pressure control.

The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases.

Analog, RS232, or DeviceNet

The T3B can communicate either via Analog, RS232, or a DeviceNet interface. DeviceNet is a high-performance communication link based on a broadcast-oriented protocol called Controller Area Network (CAN). The DeviceNet protocol, managed by the Open DeviceNet Vendor Association (ODVA), is easy to install and provides a simple and economical way for instruments and controllers to be interoperable on a network. The T3B complies with the ODVA profile for a Process Control Valve.

The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions.

High-speed Stepper Motor

The T3B utilizes a direct drive high-speed stepper motor. The valve driver provides high-resolution pressure control. The robust, high-torque motor provides extended uptime and reduces preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T3B is also available in geared versions, providing additional torque, and enabling long-term operation in harsh environments.

An encoder-based position feedback system is provided for diagnostic purposes. The valve is constructed of corrosionresistant 316 stainless steel, compatible with most process gases and is available in standard ISO flange styles with bore sizes from ¾” to 10” (20-250 mm). Standard seals offered are Viton®; alternate materials can be specified for compatibility with various process chemistries and/or heated applications.

Software Functions

  • Pressure control or position control mode
  • Set points for pressure and position control
  • Soft start mode with user-definable ramp rate
  • Adjust trip points
  • Manual override to open or close valve
  • Report pressure from external transducer
  • Report HW/SW revision, serial and model numbers
  • Report valve cycles and run hours

Need help?

Contact an Applications Specialist by sending us an email