T2BA EtherCAT®, RS232, RS485 & DeviceNet® Exhaust Throttle Valves with Integrated Controller

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t2b ethercat exhaust throttle valve with integrated controller

Overview

T2BA EtherCAT®, RS232, RS485 & DeviceNet® Exhaust Throttle Valves with Integrated Controller are specifically designed for applications where a simple, yet advanced, pressure control system is desired. The T2BA integrates all control, communication, and driver circuits within a throttle valve assembly, eliminating the need for mounting a separate pressure control electronics module. The unique model-based control algorithm and high-speed operation drives the system to set point quickly with minimum overshoot, and ensures repeatable process recipes without operator involvement.

On-board LCD touchscreen display of pressure and position
Programmable for pressure or position control
Encoder-based actual position verification
Heatable valve body (105°C standard, 150°C and 200°C optional)

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Products

Configuration Options

The following options are available for T2B Exhaust Throttle Valves
Ordering Code Example: T2BA01K220203V4000VV

Configuration Option	Option Code
T2B Downstream Pressure Controller	T2BA
Valve Bore/Flange Size
1 in./NW40 ISO-KF	01K
2 in./NW50 ISO-KF	02K
60 mm/NW63	60N
3 in./NW80	03N
4 in./NW100	04N
Flapper Type
Non-Sealing	2
Low-Conductance F-seal	3
Low-Conductance Q-seal	4
Drive Type
Direct Drive, NEMA 23-2, 8 in-lb	2
Direct Drive, NEMA 24-2, 25 in-lb	4
Geared Drive, NEMA 17-1 20:1, 40 in-lb	3
Nominal Radial Gap (NRG), Flapper/Body
0.000 in. NRG (F-seal or Q-seal)	000
0.002 in. (standard for 1 or 2 in. and 60mm)	020
0.003 in. (standard for 3 or 4 in.)	030
Heatability
Up to 105°C, without fan (for drive type selection 2 only)	3
Up to 105°C, with fan (for drive type selections 4 and 3)	1
Up to 150°C (all drive types)	2
Up to 200°C (all drive types)	4
Seal Materials (Valve Shaft)
Viton	V
Chemraz E38	C
Chemraz 592	D
Chemraz 515	W
Kalrez 4079	L
Kalrez 8085	K
Kalrez 9100	M
Kalrez 9500	N
Communications
RS232, analog pressure input, w/LCD	2
EtherCAT, no analog w/LCD	4
RS485,analog pressure input, w/LCD	5
DeviceNet, w/out analog outputs	D
Pressure Sensor Power Supply
No Power	0
±15 VDC @ 650 mA total (available RS232, RS485 and DeviceNet only)	1
Reserved
Reserved	00
Firmware
MKS will ship the current firmware revision	VV

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	Description
	T2BA Exhaust Throttle Valve, Series T2B

Specifications

Type

T2BA Exhaust Throttle Valve
Accuracy

0.25% of set point, or 5mV (whichever is greater)
Control Range

0.0001%-100% Full Scale (with Dual Transducer Input)
Flapper Types

Non-sealing and low-conductance soft-sealing
Operating Temperature

Motor and Electronics: 15 - 50°C
Valve Body: 105°C standard, 150 & 200°C optional
Storage Temperature: -20 - 80°C
Exposed Materials

Non-sealing Types: 316 SST, Tefzel
Low closed-conductance soft-sealing Types: 316 SST, Tefzel, PTFE
Shaft Seal Material: Viton, Kalrez®, Chemraz®, and others
Shaft Seal Material

Viton shaft seals are available for valve body temperatures that will not exceed 105°C and process gases compatible with Viton. For valve body heating as high as 150°C and/or process gas compatibility, various Kalrez and Chemraz compounds are also offered.
External Leak Rate

1 e^-9 atm cc/sec
Power Requirements

24 VDC @ <100 W max.
4A supply capacity recommended

Valve Bore and Flange Size

KF40, KF50, NW63, NW80 and NW100
Additional sizes available
Pressure Sensor Power

EtherCAT pressure sensors exchange data to the master and the data is available (typically ~ 1 ms refresh) as standard PDO data to the T2BA
Communication interfaces other than EtherCAT support up to 2 analog capacitance manometers.
An optional integrated power supply can supply up to 650 mA of ±15 VDC of power for one or two manometers.
Nominal Radial Gap

Standard clearances are appropriate for most applications.
Consult MKS for applications with high internal heating.
Heatability

All T2BA valves allow the valve body to be heated to 105°C standard or optionally 150°C or 200°C.
T2BA valve bodies may be heated up to 200°C with the heatability option and appropriate selection of shaft seal compound.
Drive

8 in-lb Direct Drive
25 in-lb Direct Drive
40 in-lb High Torque
Communications

EtherCAT ETG. 5003.1 Common Device Profile; ETG.5003.2030 Process Control Valve
RS232 full duplex
RS485 half duplex
DeviceNet
Pressure Input

T2BA with an EtherCAT interface do not include nor need analog connections to the process tool pressure sensors.
EtherCAT pressure sensors exchange data to the master and the data is available (typically ~ 1 ms refresh) as standard PDO data to the T2BA enabling fast, noise-free, and precise closed-loop pressure control.
Communication interfaces other than EtherCAT support up to two analog capacitance manometers.
An optional integrated power supply can supply up to 650mA of ±15 VDC of power for one or two manometers. Not available with EtherCAT
Compliance

EtherCAT: CE

Specifications

Type

T2BA Exhaust Throttle Valve
Accuracy

0.25% of set point, or 5mV (whichever is greater)
Control Range

0.0001%-100% Full Scale (with Dual Transducer Input)
Flapper Types

Non-sealing and low-conductance soft-sealing
Operating Temperature

Motor and Electronics: 15 - 50°C
Valve Body: 105°C standard, 150 & 200°C optional
Storage Temperature: -20 - 80°C
Exposed Materials

Non-sealing Types: 316 SST, Tefzel
Low closed-conductance soft-sealing Types: 316 SST, Tefzel, PTFE
Shaft Seal Material: Viton, Kalrez®, Chemraz®, and others
Shaft Seal Material

Viton shaft seals are available for valve body temperatures that will not exceed 105°C and process gases compatible with Viton. For valve body heating as high as 150°C and/or process gas compatibility, various Kalrez and Chemraz compounds are also offered.
External Leak Rate

1 e^-9 atm cc/sec
Power Requirements

24 VDC @ <100 W max.
4A supply capacity recommended

Valve Bore and Flange Size

KF40, KF50, NW63, NW80 and NW100
Additional sizes available
Pressure Sensor Power

EtherCAT pressure sensors exchange data to the master and the data is available (typically ~ 1 ms refresh) as standard PDO data to the T2BA
Communication interfaces other than EtherCAT support up to 2 analog capacitance manometers.
An optional integrated power supply can supply up to 650 mA of ±15 VDC of power for one or two manometers.
Nominal Radial Gap

Standard clearances are appropriate for most applications.
Consult MKS for applications with high internal heating.
Heatability

All T2BA valves allow the valve body to be heated to 105°C standard or optionally 150°C or 200°C.
T2BA valve bodies may be heated up to 200°C with the heatability option and appropriate selection of shaft seal compound.
Drive

8 in-lb Direct Drive
25 in-lb Direct Drive
40 in-lb High Torque
Communications

EtherCAT ETG. 5003.1 Common Device Profile; ETG.5003.2030 Process Control Valve
RS232 full duplex
RS485 half duplex
DeviceNet
Pressure Input

T2BA with an EtherCAT interface do not include nor need analog connections to the process tool pressure sensors.
EtherCAT pressure sensors exchange data to the master and the data is available (typically ~ 1 ms refresh) as standard PDO data to the T2BA enabling fast, noise-free, and precise closed-loop pressure control.
Communication interfaces other than EtherCAT support up to two analog capacitance manometers.
An optional integrated power supply can supply up to 650mA of ±15 VDC of power for one or two manometers. Not available with EtherCAT
Compliance

EtherCAT: CE

Features

High-speed Stepper Motor

The T2BA utilizes a direct drive high-speed stepper motor. The valve driver provides high resolution pressure control. The optional, high torque direct drive motor provides extended uptime and reduces preventative maintenance cycles — a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The T2BA is also available in geared versions, providing maximum torque and enabling long-term operation in harsh environments.

T2BA Pressure Control System

T2BA Exhaust Throttle Valves can operate in two modes: flapper positioning or pressure control, either of which can be user-activated through the I/O interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through the communications interface. EtherCAT T2BA is only compatible with EtherCAT manometers.

The downstream pressure control technique provides wide dynamic range, works with all types of pumps, provides fast response, and is tolerant to most effluent gases. The "intelligent instrument" concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions.