SenseStream framework has been designed especially for semiconductor industry expectations. SenseStream can run on various MKS hardware, or as a software-only solution on your server/platform. Let MKS' SenseStream SECS/GEM solutions reduce the complexity and time to market of your data integration needs.Â
SECS GEM is the communication interface commonly used in the semiconductor, electronic, and photovoltaic industries, a standard which is published and maintained by SEMI.org, an organization that governs standards for semiconductor manufacturing. "SECS" is an acronymn for "Semiconductor Equipment Communication Standard". "GEM" refers to SEMI standard E30, which describes a generic model for equipment behavior and communication using a subset of message types defined in SEMI standard E5. Deployment of SEC/GEM interfaces generally use TCP/IP networking, but RS-232 serial connections can also be used for older equipment.
SenseStream is a unique product that adds SECS/GEM capability to your existing equipment without any hardware or software installation.
The key obstacles for existing factories having equipment without data connectivity include how to retrofit this equipment to enable smart manufacturing without spending a fortune and/or massive manufacturing disruption. If your factory has equipment needing SECS/GEM capability for factory automation and data integration, SenseStream is the perfect "plug-and-play" solution.
All you need to do is connect a few cables from the SenseStream to your equipment, connect your factory host, FDC, MES, or another automation system to the HSMS or SECS-I SenseStream port, configure the system through SenseStream's Config Editor GUI, and that's it! You can even take actions based on user-defined conditional statements in the GUI based on input signals and request SenseStream to take action. With SenseStream SECS/GEM Gateway, you are not only able to collect data, but can enable the value of multiplexing, or time synchronizing, the sensor data with the rest of the tool data, alarms, and events from the equipment, and send remote commands.
The modular design and distributed architecture of the SenseStream application is the key to facilitating evolutive maintenance and deployment across the factory, and is flexible enough to accommodate specific tools requirements and capabilities.