Tool Connectivity Solutions

MKS offers a selection of connectivity products for the semiconductor industry, which requires reliable communication between equipment and factory systems.  Our products are modular and compact, allowing users to easily mount it throughout the fab or close to the point of use.   Our Tool Connectivity portfolio consists of the SenseStream application which performs data stream multiplexing and enables SECS/GEM connectivity and our endpoint detection solution enables more precise detection of process endpoints.

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