AX8580 Fully Integrated Modular Ozone Delivery System

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Overview

The AX8580 Ozone Delivery System generates and delivers high flow, high concentration, ultra-clean ozone for advanced thin film applications. The AX8580 is specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD and TEOS/Ozone CVD.

Fully integrated, modular system equipped with up to (4) AX8415 generators for the highest concentration at the highest flow
Individually controlled generator outputs support up to (4) channels or combined into a single channel chamber process tool
Highest ozone concentrations >400g/Nm3 at the highest flow rates for improved thin film quality
Improved operating performance and extended lifetime due to cooling improvements and optional in-rack chiller
Compatible with or without nitrogen for ultra-clean ozone
Optional integrated ozone destruct for protection from unintended ozone exposure

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Flow Rate	Type	Ozone Output	Availability	Featured Item	Price		Brand
		AX8580 Ozone Delivery System, 50 slm per channel, Fully Integrated Modular Contact Us	AX8580 Ozone Delivery System, 50 slm per channel, Fully Integrated Modular	UNIVERSAL	0.0	1.0	0.0		0.0	2.5 gpm per generator	Ozone Gas Delivery System	>400g/Nm³	Contact Us

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Specifications

Type

Ozone Gas Delivery System
Ozone Output

>400g/Nm³
Flow Rate

2.5 gpm per generator
Feed Gas

Oxygen, Nitrogen
Feed Gas Supply Pressure

70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm²) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm²) maximum N2 pressure 10 psi higher than O2 pressure
Feed Gas Purity

99.9995% minimum
Operating Temperature

5 - 40°C (41 - 104°F)
Cooling Water Temperature Required

5 - 17°C
Cooling Water Filtration Required

100 microns
Cooling Water Quality Required

1 - 3 MΩcm DI
Cooling Water Minimum Flow Required

2.5 gpm per generator
Cooling Water Connections Required

1 in. compression (Swagelok®)
Cooling Water Heat Load Required

5 kw per generator
Voltage Requirements

208 volts AC (±10%), three phase

Current Requirements

65 Amps max (fully populated system)
Frequency

50/60 Hz
Exhaust Flow Rate

Two-generator system requires 125 CFM (3.5m³/min), Four-generator system requires 250 CFM (7m³/min), Static Pressure 125CFM (3.5m³/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m³/min)
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
Control Air Pressure

70 - 100 psig (483 - 689 kPa)
Control Air Type

CDA or dry nitrogen, 40µ filtered
Control Air Fitting

0.25 in. compression (Swagelok®)
Exhaust Connection

6 in. diameter duct opening standard
Dimensions

26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
Compliance

ETL 9700614, SEMI S2-0715
Altitude

Up to 1000 m (3280 ft) above mean sea level

Features

Environmentally Friendly Solution

Ozone has many advantages over other oxidizers as a strong oxidizing agent. Ozone has a high redox potential, can be generated at the point-of-use, and it decays naturally into oxygen (2O3 ⇒ 3O2). Therefore, it is considered a "green" chemical. If required, ozone can also be destroyed at the output of the process chamber using a catalytic or thermal destruct unit. This significantly lowers the chemical disposal cost, as the output is oxygen and contains no ozone. Ozone is very stable at room temperature, making it a good choice for most applications. Typical ozone applications include atomic layer deposition (ALD), chemical vapor deposition (CVD), photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

Multi-channel Capability

The AX8575 system is configurable with up to four (4) independent channels to support multiple tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. For ultra high concentration processes the system can be configured for up to two (2) channels with an in-rack chiller thereby maintaining the same footprint. The ozone source for each channel is the production-proven AX8415 series ozone generators. It incorporates MKS patented, field proven, high concentration, ultra clean ozone generation technology. The AX8580 includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor and status indicator panel. For ozone performance of each output channel, refer to Figures 1 and 2.