Sorry, this family of products is no longer available. The replacement family of products is T-Series Advanced IR Gas Analyzer for Process Monitoring.
Process Sense™ TFS™ Sensor
Overview
The Process Sense™ TFS™ Sensor with Tunable Filter Spectroscopy (TFS) is a spectroscopic technique capable of generating a “mini-scan,” producing a slice of spectra in the infrared band. The scan provides absorption peaks used to select compounds and provide concentration values.
Specifications
-
TypeChamber Endpoint Sensor
-
Measurement TechniqueTunable Filter Spectroscopy
-
Measurement RangeSiF4: 1 - 200 ppm (at 760 Torr)
-
Detection Limit2 ppm SiF4
-
Response Time1 second report rate
-
Calibration Accuracy±10%
-
Repeatability<1% Full Scale, consecutive measurements
-
Electrical ConnectorDB15
-
Power Requirements120 VAC, 230 VAC, or 24 VDC (2 amp)
-
DimensionsSensor: 17.2 x 5.9 x 5.5 in. (437 x 150 x 140 mm)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm) -
Weight3.2 kg (7 lbs)
-
Analog OutputAnalog 1 (AO1): 0 - 10 V (user configurable)
Analog 2 (AO2): 0 - 10 V (user configurable) -
Digital OutputDigital 1: Fault status signal
Digital Service Port: Diagnostic codes -
Sample Pressure0.5 - 760 Torr
-
Sample Temperature20 - 60°C
-
FittingsNW25 (other sizes available upon request)
-
ComplianceCE
Ultra-High Velocity