Sorry, this product is no longer offered for sale. The recommended replacement product is t-series-ir-gas-analyzer.
Process Sense™ TFS™ Sensor
Process Sense™ TFS™ Sensor
The Process Sense™ TFS™ Sensor with Tunable Filter Spectroscopy (TFS) is a spectroscopic technique capable of generating a “mini-scan,” producing a slice of spectra in the infrared band. The scan provides absorption peaks used to select compounds and provide concentration values.
Specifications
- TypeChamber Endpoint Sensor
- Measurement TechniqueTunable Filter Spectroscopy
- Measurement RangeSiF4: 1 - 200 ppm (at 760 Torr)
- Detection Limit2 ppm SiF4
- Response Time1 second report rate
- Calibration Accuracy±10%
- Repeatability<1% Full Scale, consecutive measurements
- Electrical ConnectorDB15
- Power Requirements120 VAC, 230 VAC, or 24 VDC (2 amp)
- DimensionsSensor: 17.2 x 5.9 x 5.5 in. (437 x 150 x 140 mm)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm) - Weight3.2 kg (7 lbs)
- Analog OutputAnalog 1 (AO1): 0 - 10 V (user configurable)
Analog 2 (AO2): 0 - 10 V (user configurable) - Digital OutputDigital 1: Fault status signal
Digital Service Port: Diagnostic codes - Sample Pressure0.5 - 760 Torr
- Sample Temperature20 - 60°C
- FittingsNW25 (other sizes available upon request)
- ComplianceCE
Resources
Literature
Process Sense™ TFS™ (Archive)(240.5 kB, PDF)
Software
TFSdiag Utility Program(237.2 MB, ZIP)