T-Series Advanced IR Gas Analyzer for Process Monitoring
Overview
T-Series Inline Gas Analyzer improves gas measurement accuracy over the traditional non-dispersive infrared (NDIR) analyzers using Tunable Filter Spectroscopy (TFS™), a spectroscopic scanning technique capable of generating slices of spectra in the infrared region. Each scan produces an absorption spectrum which is used to identify compounds and provide concentration values. TFS technology improves gas identification accuracy and selectivity by subtracting out spectra from interferent gases within the same infrared regions. This spectral processing capability also provides multi-component measurement.
- High accuracy and selectivity
- Analytical versatility with ppm to percent level sensitivity for most IR active gases
- Complete integration-ready system with easy installation & maintenance lowers cost-of-ownership
- Inline or in-process sampling with configurable manifold and sample ports design
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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T-SERIES-IR Inline IR Gas Analyzer, T-Series |
15 Weeks
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Specifications
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TypeIR Gas Analyzer
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Measurement TechniqueIR absorption using Tunable Filter Spectrometry
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Measurable Gases & VaporsSiF4, CO2, WF6, and SiF4 & CO2 (dual gas measurement)
Other gases available (measurement feasibility dependent on sample matrix) -
Gas Cell Pathlength15 cm (standard), contact MKS for custom length
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Update rate1-20 seconds (software configurable)
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CalibrationFactory calibrated; no recalibration required
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Optics Purge FlowDry nitrogen or air
(required for measurement certain gases; contact MKS) -
Power Requirements120 VAC, 230 VAC, or 24 VDC (2 amp)
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DimensionsSensor Head: 16.0 x 6.0 x 5.4 in. (407 x 153 x 137 mm)
(for 15 cm cell with KF40 fitting)
Control Box: 12.6 x 10.0 x 3.1 in. (320 x 254 x 78 mm)
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Weight7 lbs. (3.2kg)
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Analog OutputAnalog 1: 0 - 10 V (user configurable)
Analog 2: 0 - 10 V (user configurable) -
Sample Pressure0.5 - 760 Torr (other ranges available)
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Sample Temperature20 - 60°C
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FittingsNW25 (other sizes available upon request)
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Fault IndicatorDigital Output 1
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Service PortDigital Diagnostic Codes
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ConnectorDB15
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CommunicationModbus TCP/IP
Features
True in-process measurement is achieved with the T-Series by employing a single path optical design with the gas cell located between the infrared source and the spectrometer/detector. A variety of sample ports can be accommodated from compression fittings to KF flanges commonly used in semiconductor applications.
The T-Series is a versatile analyzer platform that can be factory configured to monitor or detect various IR active gases from near to mid-infrared at either parts per million capability or percent level sensitivities. With high measurement accuracy, selectivity and multi-component identification, the T-Series is the preferred solution over other spectroscopic techniques for Semiconductor, Specialty Gases and other Chemical process monitoring applications.
Applications:
- Chamber clean end-point detection
- Etch process monitoring
- Gas blending control
- Chemical process monitoring
Schematic Diagram
Resources
Literature
- T-Series Advanced IR Gas Analyzer for Process Monitoring (307.3 kB, PDF)
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