T-Series Inline Gas Analyzer improves gas measurement accuracy over the traditional non-dispersive infrared (NDIR) analyzers using Tunable Filter Spectroscopy (TFS™), a spectroscopic scanning technique capable of generating slices of spectra in the infrared region. Each scan produces an absorption spectrum which is used to identify compounds and provide concentration values. TFS technology improves gas identification accuracy and selectivity by subtracting out spectra from interferent gases within the same infrared regions. This spectral processing capability also provides multi-component measurement.
True in-process measurement is achieved with the T-Series by employing a single path optical design with the gas cell located between the infrared source and the spectrometer/detector. A variety of sample ports can be accommodated from compression fittings to KF flanges commonly used in semiconductor applications.
The T-Series is a versatile analyzer platform that can be factory configured to monitor or detect various IR active gases from near to mid-infrared at either parts per million capability or percent level sensitivities. With high measurement accuracy, selectivity and multi-component identification, the T-Series is the preferred solution over other spectroscopic techniques for Semiconductor, Specialty Gases and other Chemical process monitoring applications.