Compare Description Drawings, CAD & Specs Availability Price
paragon 8.0 slm nf3 flow intelligent remote plasma source
Remote Plasma Source, 8 slm, NF3 Flow, Paragon


  • Type
    AX7710MKS-01 Remote Plasma Source
  • Gas Supply During Ignition
    100% Ar for ignition only
  • Gas Supply Post Ignition
    Up to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
  • NF3 Operation Reactant Output
    >95% dissociation across operating space, 1-10T, 1-8 slm
  • O2: NF3 Mix Operation Reactant Output
    >95% dissociation across operating space, 1-10T, 1-8 slm
  • Process Gas Feed & Exhaust
    Inlet Gas Connection KF40
    Outlet Gas Connection KF50
  • Duty Cycle
    2 sec on time minimum to 100% (process times >45 minutes)
  • Gas Flow
    During Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
    Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3
  • Wetted Materials
    PEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
  • Operating Temperature
    Ambient air 40°C max.
  • Cooling Water Required
    2.0 gpm, <30°C
  • Control Interface
    EtherCAT and analog I/O 25 pin D
  • Power Requirements
    208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
  • Dimensions
    18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
  • Weight
    54 lb. (24.5 Kg)
  • Compliance
    CE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1


Analog or EtherCAT Control

The Paragon remote plasma source is available with both analog and EtherCAT® communication ports. EtherCAT can be used for direct control of the Paragon, or in combination with the analog port, as a data monitoring port only. The Paragon streams intelligent data sets to the tool or fab database to monitor or modify operating parameters to keep process tools running at peak efficiency and to support diagnostics (APC, FDC) applications.

Need help?

Contact an Applications Specialist by sending us an email