Paragon® 8.0 slm NF3 Flow Intelligent Remote Plasma Source
Overview
For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 95%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
- Up to 8 slm NF flow, in a compact size enables faster clean times
- Best in Class dissociation (>95%) for efficient uniform cleaning results
- EtherCAT intelligent data reporting for faster, tighter device operation
- Compatible with O2 and NF3 mixed gases
- Proprietary PEO plasma block design offers greater process performance
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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AX7710MKS-01 Remote Plasma Source, 8 slm, NF3 Flow, Paragon |
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Specifications
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TypeAX7710MKS-01 Remote Plasma Source
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Gas Supply During Ignition100% Ar for ignition only
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Gas Supply Post IgnitionUp to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
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NF3 Operation Reactant Output>95% dissociation across operating space, 1-10T, 1-8 slm
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O2: NF3 Mix Operation Reactant Output>95% dissociation across operating space, 1-10T, 1-8 slm
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Process Gas Feed & ExhaustInlet Gas Connection KF40
Outlet Gas Connection KF50 -
Duty Cycle2 sec on time minimum to 100% (process times >45 minutes)
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Gas FlowDuring Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3
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Wetted MaterialsPEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
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Operating TemperatureAmbient air 40°C max.
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Cooling Water Required2.0 gpm, <30°C
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Control InterfaceEtherCAT and analog I/O 25 pin D
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Power Requirements208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
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Dimensions18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
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Weight54 lb. (24.5 Kg)
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ComplianceCE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1
Features
Analog or EtherCAT Control
The Paragon remote plasma source is available with both analog and EtherCAT® communication ports. EtherCAT can be used for direct control of the Paragon, or in combination with the analog port, as a data monitoring port only. The Paragon streams intelligent data sets to the tool or fab database to monitor or modify operating parameters to keep process tools running at peak efficiency and to support diagnostics (APC, FDC) applications.
Resources
Application Notes
- ASTRON® Remote Plasma Source: Atomic Fluorine Transport (319.7 kB, PDF)
- Best Practice for Integration of the ASTRON® Remote Plasma Source (438.5 kB, PDF)
- Optimized Block Coating for Paragon Remote Plasma Source (229.8 kB, PDF)
- ASTRON® Remote Plasma Source Ignition Best Practices (394 kB, PDF)
Drawings & CADs
- Paragon AX7710MKS-01 Dimensional Drawing (224.6 kB, PDF)
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