Specifications

  • Type
    LIQUOZON® Single 20 slm Ozone Water Delivery System
  • Ozone Concentration
    5 - 95 ppm
  • Flow Rate
    0.5 - 20 lpm
  • Operating Pressure
    Constant set point configurable from 1.0 to 2.5 bargauge (15-36 psig)
    Closed-loop controlled, nominal pressure: 2.5 bargauge (36 psig)
  • Feed Gas
    O2
  • Feed Gas Quality
    Oxygen, grade 4 (purity > 99.99%) or better
  • Feed Gas Inlet Pressure
    4.5-7.6 bargauge (65-110 psig)
  • Dopant Gas
    CO2
  • Dopant Gas Quality
    Carbon Dioxide, grade 4.5 (purity > 99.995%) or better
  • Dopant Gas Flow Rate
    Typically 0.15 slm
  • Dopant Gas Inlet Pressure
    5.0-7.6 bargauge (73 - 110 psig)
  • UPW Pressure
    1.8-5.0 bargauge (26 - 73 psig), min. 0.8 bar (12 psi) above system operating pressure
  • UPW Purity
    Purity according to process demands
  • UPW Temperature
    15 - 25°C (59 - 77°F)
  • Cooling Water Flow Recommended
    14-0041-222: Typically 1.5 L/min (0.4 gpm)
    14-0042-222: Typically 2.3 L/min (0.61 gpm)
    14-0044-222: Typically 3.7 L/min (0.98 gpm)
  • Cooling Water Pressure
    2.0-5.0 bargauge (29 - 73 psig)
  • Cooling Water Temperature
    17 - 23°C (63 - 73°F), rated 20°C (68°F)
  • Cooling Water Quality
    Demineralized (Resistivity > 50 kΩ cm), 100µm filtered
  • Ambient Temperature
    Max. 35°C (95°F)
  • Control Interfaces
    Discrete communication, RS232
  • Power
    14-0041-222: 3/PE~, 208 VAC, 50/60 Hz 0.500 kVA
    14-0042-222: 3/PE~, 208 VAC, 50/60 Hz 0.850 kVA
    14-0044-222: 3/PE~, 208 VAC, 50/60 Hz 1.600 kVA
  • Dimensions
    412 x 512 x 1215 mm (16.2 x 20.2 x 47.8 inches )
  • Weight
    135 kg (298 lbs.)
  • Compliance
    CE, SEMI S2-0302, SEMI F47, SEMI S2, UL 61010-1

Resources

Application Notes

Drawings & CADs

Literature

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