Sorry, this family of products is no longer available. For recommended replacements see mass-flow-meters.
IM100A IP66-rated Metal-sealed 50-100 slm Mass Flow Meters
Overview
The IM100A is a general purpose, metal-sealed, MFM well suited for use in harsh environments where resistance to liquid, or dust, are critical. The IM100A meets these requirements with its IP66 rated enclosure design. The IM100A incorporates the latest in digital flow control electronics along with a well proven, patented thermal sensor and mechanical design for measurement of Full Scale flow rates from 100 sccm to 100 SLM. This MFM is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing accurate, and repeatable, flow measurement.
Specifications
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TypeMass Flow Meter (MFM)
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Full Scale Flow Range50,000-100,000 sccm (N2 equivalent)
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Measurement Range0.1% to 100% of Full Scale (range on mech.)
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Fitting TypeCompatible with:
Swagelok® 4 VCR® high flow male
Swagelok 8 VCR male
0.5 in. Swagelok
10mm Swagelok
KF-16 -
Maximum Inlet Pressure500 psi
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Proof Pressure1000 psig
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Burst Pressure1500 psig
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Typical Accuracy±1% of Reading (with N2 calibration gas)
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Repeatability±0.3% of Reading
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Resolution0.1% of Full Scale
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Zero Temperature Coefficient<0.05% of Full Scale/°C
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Span Temperature Coefficient<0.08% of Reading/°C
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Inlet Pressure Coefficient<0.02% of Reading/psi
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Warm-up Time30 minutes
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Operating Temperature10-50°C
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Storage Humidity0 to 95% Relative Humidity, non-condensing
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Storage Temperature-20° to 80°C (-4° to 149° F)
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External Leak Integrity<1 x 10-10
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Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
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Surface Finish10μ inch average Ra
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Enclosure RatingIP66
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Power Requirements+15 to +24 VDC @ (<2 watts)
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Flow Input Output SignalVoltage (0 to 5 VDC)
Current (4 to 20 mA) -
Analog I/O Connector15 pin Type "D" male, 9 pin Type "D" male
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Weight<2.5 lbs (1.1 kg)
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ComplianceCE
Resources
Manuals
- G and I Series Mass Flow Controller/Meter Manual (2.2 MB, PDF)
- G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement (86.9 kB, PDF)
- G-Series/I-Series MFC Modbus Register Map and Specification (502.9 kB, PDF)
Drawings & CADs
- IM100A Mass Flow Controller/Meter Dimensional Drawing (457.7 kB, PDF)
Ultra-High Velocity