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GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators
GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
Specifications
- TypeGHW Series 13.56 MHz RF Plasma Generator
- Frequency13.56MHz ±0.005%
- Power OutputGHW-12: 1250 W
GHW-25: 2500 W
GHW-50: 5000 W - Load Impedance RangeUnlimited
- RF Stability/Spurious OutputUnconditionally stable for any load within operational limits < -45dBc
- Harmonic Output & Distortion< -40dBc
- Load Mismatch ProtectionGHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power. - Regulation ToleranceGHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W - Input AC PowerGHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE
- RF ConnectorType N
- InterfaceStandard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
- ReadoutDigital readout displays frequency and forward, reflected and load power.
- Rack MountingEIA (Standard) 19-inch adapters supplied
- Cooling SystemGHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread. - DimensionsGHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
(H x W x D, excluding handles & connectors) - WeightGHW-12: 32.5 lbs. (14.8 kg)
GHW-25: 55 lbs. (24.9 kg)
GHW-50: 91 lbs. (41.3 kg) - ComplianceCE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1