The DI-Solver™ CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or metallic corrosion. By adding carbon dioxide to UPW (ultrapure water) conductive DI-CO2 water (carbonated DI-water) is created, which prevents surface charging. Dissolved carbon dioxide provides optimal cleaning capability in an acidic chemistry, improving cleanliness. The prevention of ESD effects reduces structural damage such as punch through holes, arcing and improves yield.
The DI-Solver system is designed to deliver dissolved carbon dioxide with a constant conductivity at different flow rates for single or multiple applications simultaneously. Operated within the specified ranges, the typical conductivity control accuracy for a stable dissolved carbon dioxide flow differs less than 5% from setpoint.
MKS’ DI-Solver CO2 is a component-based system to be integrated into a tool. It fully meets the demands of the semiconductor industry by using only high purity standard materials and safety features. The units provide a conductivity range from 5-50 μS/cm at 0.5-60 liters/min.