Specifications

  • Type
    AX7685 Reactive Gas Generator
  • Gas Supply During Ignition
    100% Ar
  • Gas Supply Post Ignition
    Up to 6 slm of NF3 (after plasma ignition NF3 can be added and the Ar removed)
    Contact MKS for alternate gas capability
  • NF3 Operation Reactant Output
    >95% dissociation up to 6 slm NF3 at 5 Torr (0.5 slm to 6.0 slm typical)
  • Inputs
    On/Off
  • Outputs
    Ready, AC line, Plasma On
  • Gas Flow
    1 to 4 Torr during ignition measured at ASTRON outlet
    1 to 10 Torr post ignition measured at ASTRON outlet once flow is stabilized
  • Wetted Materials
    6061-T6 Aluminum hardcoat anodized, 6061-T6 Aluminum, Chemraz®, Alumina
  • Operating Temperature
    Ambient 40°C max.
  • Cooling Water Required
    2.0 gpm, < 30°C
  • Control Interface
    9 and 25 pin D connectors, opto-isolated I/O
  • Power Requirements
    187 to 228 VAC, 50/60 Hz, 60A, 3 phase
  • Dimensions
    16.7 in. L x 14.5 in. W x 10.1 in. H (424 x 368 x 26 mm nominal)
  • Weight
    74 lb. (33.5 kg)
  • Compliance
    CE, SEMI S2-0200, SEMI F47

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