Configuration Options

AMDS-1000 Arc Monitoring and Detection System


  • Analog, digital and combined communication protocols
  • Ability to detect micro arcs lasting several microseconds and hard arcs over hundred microseconds
  • Analyzes arc data and extracts severity and magnitude in real-time
  • Monitors or detects arcs in the whole plasma processing including plasma ignition and power transition
  • Multiple chamber support
  • Works with MKS Process Eye Professional Residual Gas Analyzer software for data acquisition, interpretation, recall, and intelligent alarming
  • Provides automated monitoring of semiconductor tools when combined with TOOLweb RGA software

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