Specifications

  • Type
    Pressure Transducer
  • Sensor Type
    Reference Capacitance Manometer
  • Measurement Type
    Differential
  • Full Scale Pressure Ranges
    0.1, 1, 10, 100, 1000 Torr
  • Sensor Temperature
    Controlled to 45°C
  • Fitting Type
    Swagelok 4 VCR® female
  • Resolution
    1x10-6 of Full Scale
  • Calibration
    Unidirectional or Bidirectional
  • Electrical Connector
    15-pin D-sub
  • Zero Temperature Coefficient
    1-1000 Torr Ranges: 15 PPM, Full Scale/°C (at 0.12% of Rdg accuracy)
    0.1 Torr range: <30 PPM, Full Scale/°C
  • Span Temperature Coefficient
    1-1000 Torr Ranges: 0.002% Reading/°C
    0.1 Torr Range: <0.010% Reading/°C
  • Maximum Line Pressure
    150 psig
  • Materials Exposed to Process Gases
    Inconel® and 304 stainless steel
  • Reference Side (PR) Media Compatibility
    Any dry gas compatible with Inconel®, 304/306 SS, Fosterite, Palladium
  • Measurement Side (Px) Media Compatibility
    Any gas compatible with Inconel®, 304 stainless steel
  • Volume
    Measurement Side (Px): 3.5 cc
    Reference Side (PR): 25 cc
  • Time Constant with Signal Conditioner
    Fast Position: 25 ms
    Standard Position: 40 ms
    Slow Position: 400 ms

Need help?

Contact an Applications Specialist by sending us an email