Sorry, this family of products is no longer available. The replacement family of products is T2BA EtherCAT®, RS232, RS485, DeviceNet®, and Analog/TTL I/O Exhaust Throttle Valves with Integrated Controller.
683B DeviceNet™ Exhaust Throttle Valves with Integrated Controller
Overview
The 683B intelligent exhaust throttle valve integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto an MKS Type 253 throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The second generation PID control algorithm can be tuned to drive the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The loop tuning parameters are completely adjustable to accommodate variations in system parameters.
Specifications
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Type653B Exhaust Throttle Valve
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Operating TemperatureStandard: 0 - 100°C 0 - 90°C
Optional: 0 - 150°C -
Valve Motor Ambient Operating Temperature-20 to +40°C
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Exposed MaterialsStandard: 316L S.S., Viton®
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Closed Leakage<10-7 (Torr l/s)
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Valve Speed1.7 sec
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Resolution1/12,000
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DriveDirect gear drive
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Differential Pressure Across Valve1 atm. (15 psig) max.
Resources
Literature
- 683B Digital Exhaust Throttle Valve (Archive) (202.9 kB, PDF)
Manuals
- 683 Smart Exhaust Throttle Valve Pin-outs (31.2 kB, PDF)
Device Description Files
- 683 Exhaust Throttle Valve EDS File (1.7 kB, EDS)
Ultra-High Velocity