Sorry, this family of products is no longer available. The replacement family of products is T2BA EtherCAT®, RS232, RS485, DeviceNet®, and Analog/TTL I/O Exhaust Throttle Valves with Integrated Controller.
The 683B intelligent exhaust throttle valve integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto an MKS Type 253 throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The second generation PID control algorithm can be tuned to drive the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The loop tuning parameters are completely adjustable to accommodate variations in system parameters.